Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 65

CRYO-U Cryopump Instruction Manual
®
8.1. Scheduled and Unscheduled Maintenance ················· 8-1
8.2. Consumables ······················································· 8-3
8.3. Cleaning the Cryopump ·········································· 8-4
8.4. Charging Helium Gas ············································· 8-5
8.5. Helium Circuit Decontamination ······························· 8-8
8.1. Scheduled and Unscheduled Maintenance
◇ Scheduled Maintenance ：
◇ Unscheduled Maintenance：
Following items and helium gas are necessary for charging helium gas or helium line
decontamination.
1
Helium charging adapter kit
(Regulator, Charging hose 2.4M, Charging adopter)
2
<Items independently available>
Regulator (for helium gas)
Charging hose 2.4M
Charging adapter
3
Helium gas (with purity of 99.999% or above)
8. MAINTENANCE
Electrical insulation property check of the heater for regeneration
Replacement of maintenance parts in the refrigerator
Replacement of the compressor adsorber
Cleaning the cryopump
Adding helium gas
Decontamination of the helium gas line
Calibration of Cryometer
Item
ULVAC CRYOGENICS INCORPORATED
Volume Item code
1 A700B5101000
1 A700A5101700
1 A700A5101800
1 A700B5101100
－ －
8-1