Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 87

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CRYO-U

Cryopump Instruction Manual

１． Specifications

・Gas

・Pressure

・Temperature ： 0 to 70℃

・Material

・Length

・Minimum Bending Radius ： 250mm

・Recommended Torque for Connecting ： 20N･m

・Connection

２． Precaution in Handling

・ When carrying the flexible hose, hold the braid support of the hose. If it is bended

forcibly at an acute angle, it may be damaged.

・ Avoid twisting the flexible hose especially when making final connection.

・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the

flexible hoses in order to prevent modification and crushing of them.

MA0B001E,2010.01

Appendix B

FLEXIBLE HOSE

： Helium Gas（Purity：99.999％ or more）

： Max. 2.45MPaG

： SUS304

： 3000mm (standard)

※It is fastened and crowded until self seal coupling stops turning.

： 1/2B self-sealing coupling

CAUTION

ULVAC CRYOGENICS INCORPORATED

B-1

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Cryopump cryo-u 20h