Section 3 Quick Installation; Quick Installation - Ulvac CRYOPUMP CRYO-U Series Instruction Manual

CRYO-U Cryopump Instruction Manual
®
This section provides simple installation procedures for users who are already familiar
with cryopump installation and operation.
If more details are required, please refer to the explanation of each section shown in
the table below.
Steps
◆Do not connect the compressor unit to its power source before the
following installation processes finish.
Mount the cryopump to the vacuum system.
１
Connect the roughing system, regeneration gas purge unit, and
２
exhaust duct line to the cryopump.
Connect the cooling water piping to the compressor unit.
３
Connect the cryopump to the compressor unit with flexible hoses.
４
In case of remote operation, remote wiring is necessary.
５
Connect the refrigerator power cable from the cryopump to the
６
compressor unit.
Connect the input power cable from the compressor unit to its power
７
source.
Start the cryopump system according to the procedure described in
８
"Section 5 Operation".
MA03001E,2010.01

3. QUICK INSTALLATION

Table 3-1.
Procedures
ULVAC CRYOGENICS INCORPORATED
Quick Installation
WARNING
For Details
Section 4.2
Section4.3,
4.4 and 4.5
Section 4.6
Section 4.7
Section 4.8
Section 4.9
Section 4.9
Section 5
3-1