Ulvac CRYOPUMP CRYO-U 20H Manuals

Manuals and User Guides for Ulvac CRYOPUMP CRYO-U 20H. We have 1 Ulvac CRYOPUMP CRYO-U 20H manual available for free PDF download: Instruction Manual

Ulvac CRYOPUMP CRYO-U 20H Instruction Manual

Ulvac CRYOPUMP CRYO-U 20H Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents

9
- Safety Instructions
  13
- Disposal Consideration
  25
- SECTION 1 Cryopump Description
  
  27
  - The General
    27
    
    Cryopump System
    27
  - Specifications
    28
    
    Cryopump
    28
  - Environmental Requirements
    29
    
    External Drawing of CRYO-U
    31
    
    Major Components
    32
- SECTION 2 Inspection
  
  33
  - 2.1 Shipping List
    33
    
    Shipping List for Cryopump Assembly
    33
    
    Shipping List for Cryopump System
    33
  - 2.2 First Inspection of Cryopump
    34
- SECTION 3 Quick Installation
  
  35
  - Quick Installation
    35
    
    Quick Installation Process Flow
    36
4. Installation

37
- SECTION 4 Installation
  37
  - Auxiliary Equipments Required
    37
  - Figure 1-1 Typical CRYO-U
    38
    
    Cryopump Vacuum System
    38
    
    Example of CRYO-U
    38
  - Installation
    38
    
    Examples of Cryopump Installation
    39
  - Mounting the Cryopump to the Vacuum System
    39
  - Connecting Roughing Pump
    41
  - Connecting Purge Gas Line
    41
    
    Pressure Loss of Regeneration Gas Purge PR Unit
    42
  - Connecting Exhaust Pipe
    42
    
    Connecting Flexible Hoses
    43
  - Connecting Cooling Water Pipe
    43
  - Connecting Remote Wiring
    44
  - Connecting Electrical Cables
    44
    
    Connecting Flexible Hoses
    45
5. Operation

47
- Operation
  48
- Pressure Buildup Test
  48
- Rough Pumping
  48
- Startup and Cooldown
  48
- Normal Operation
  49
- Crossover
  50
- Handling of Hazardous Materials
  52
  - 7.1 Disconnecting Flexible Hose
    61
  - Cryo-U
    61
    
    Disconnecting Flexible Hose
    62
    
    Charging Helium Gas
    71
    
    Vapor Pressure of Various Kinds of Gas
    92
    
    Principle of Refrigeration
    93
    
    Two-Stage Refrigerator
    96
- Shutdown Procedures
  52

Advertisement

Advertisement

Related Products

Ulvac Categories

Water Pump Air Compressor

Power Supply

Power Supply Measuring Instruments Industrial Equipment

More Ulvac Manuals