Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 101

CRYO-U Cryopump Instruction Manual
®
Revision History
Date Revision No.
2010-01-25 2010.01
2010-09-09 2010SR01
2010NR02
2010-11-04
2011-10-26 2011OR03
2013-08-22 2013AT04
2013DR05
2013-12-02
2014-02-21 2014FY06
First edition.
P.8. Item names and item codes of equipments for maintenance
have been changed.
Cover: Export control policy has been revised.
Section 5.3 Pressure Buildup Test has been revised.
"SERVICE NETWORK" has been revised.
Cover: Export control policy has been revised.
"Safety Instructions"
regeneration ① The description of inert gas has been added
to the section ①.
P.4-5 Section 4.4 "Connecting Purge Gas Line"
P.6-2 "◇Unassisted warm-up" CAUTION section
P.6-3 "◇ Assisted warm-up using inert gas"
The descriptions of inert gas have been changed in the three
sections listed above.
P.1-2 Table 1-1 Specification
Argon maximum throughput has been changed.
P.4-5 Section 4.4 "Connecting Purge Line"
The supply pressure has been changed from "5kPaG or less"
to "10kPaG or less".
The description of Regeneration Gas Purge PR Unit has been
revised.
P.6-3 The content of "◇Assisted war-up using a heater" and
a CAUTION section have been revised.
P.6-3/6-5 Section 6.4 Regeneration Flow Chart
The contents of "Ⅲ. Pressure buildup check" has been
revised.
Table A-1 CRYOPUMP Fault Diagnosis has been revised.
"SERVICE NETWORK" has been revised.
"Introduction" has been revised.
"SERVICE NETWORK" has been revised."
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
ULVAC CRYOGENICS INCORPORATED
Contents
P. S-7 1.Safety measures for
R-1