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Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 30

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Cryopump Description
◆Accessory Flange (UVG-40)
10
2.8
４－φ１０(等配)
Ｏリング Ｖ５５
1-4
ULVAC CRYOGENICS INCORPORATED

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Cryopump cryo-u 20h

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