Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 89

CRYO-U Cryopump Instruction Manual
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CONVERSION OF THERMOMETER READINGS
１． K(CA) Thermocouple Electromotive Force
Temperature
(K)
300
250
200
150
100
50
1
0
MA0C001E,2010.01
Appendix C
-1
-2
E.M.F. (mV)
（Ambient Temperature：20℃）
ULVAC CRYOGENICS INCORPORATED
-3 -4
-5 -6
-7
C-1