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2
Technical data
2.1
Performance
Maximum pump pressure
Critical backing pressure/ultimate
vacuum (with specified fluid)
®
Santovac
5
DC702
DC704EU
DC705
Edwards L9
®
Apiezon
C
Pumping speed
Nitrogen
Hydrogen
Water vapour
Minimum backing pump displacement
Recommended Edwards backing pump
Liquid nitrogen charge duration
*
For maximum throughput.
2.2
Mechanical data
*
Pneumatic connections
†
Mounting screw torque
Mass: M-model pumps
Mass: P-model pumps
Dimensions: M-model pumps
Dimensions: P-model pumps
Inlet connection (compatible with)
Backing connection
Cooling-water connections
Pump fluid charge (dry)
Liquid nitrogen charge
Position indicator enclosure protection
*
P-model pumps only.
†
On position indicators on CR63/150 and CR100/300 pumps only.
© Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 1 - Performance data
300 mbar gauge, 1.3 bar absolute, 1.3 x 10
Critical backing pressure
0.6 mbar
1.2 mbar
0.8 mbar
0.6 mbar
0.6 mbar
0.7 mbar
CR63/150
CR100/300
-1
120 l s
-1
190 l s
-1
500 l s
*
3
-1
5 m
h
RV5
RV5 or RV8
18 h
Table 2 - Mechanical data
1
6 mm couplings x
/
BSP male stud
4
0.4 N m
CR63/150
CR100/300
16 kg
17 kg
See
Figure 2
See
See
Figure 3
See
ISO63
NW10
6 mm compression
60 ml
2.7 l
IP67
5
Pa
Ultimate vacuum
-8
60 Pa
3 x 10
mbar
-6
120 Pa
7 x 10
mbar
-8
80 Pa
7 x 10
mbar
-8
60 Pa
3 x 10
mbar
-8
60 Pa
3 x 10
mbar
-8
70 Pa
7 x 10
mbar
CR160/700
-1
-1
230 l s
600 l s
-1
-1
450 l s
1200 l s
-1
-1
900 l s
2000 l s
3
-1
3
-1
5 m
h
12 m
h
RV12 or E2M18
18 h
18 h
CR160/700
20 kg
41 kg
21 kg
42 kg
Figure 2
See
Figure 2
Figure 3
See
Figure 3
ISO100
ISO160
NW25
NW25
10 mm compression
125 ml
250 ml
3.7 l
7.3 l
IP67
IP22
B348-00-880 Issue J
-6
3 x 10
Pa
-4
7 x 10
Pa
-6
7 x 10
Pa
-6
3 x 10
Pa
-6
3 x 10
Pa
-6
7 x 10
Pa
CR250/2000
-1
1700 l s
-1
3000 l s
-1
6000 l s
3
-1
40 m
h
E2M40
24 h
CR250/2000
82 kg
83 kg
See
Figure 2
See
Figure 3
ISO250
NW40
500 ml
16 l
IP22
Page 5
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