Edwards Diffstak 63/150 Instruction Manual
Edwards Diffstak 63/150 Instruction Manual

Edwards Diffstak 63/150 Instruction Manual

Mk2 diffusion pumps
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B344-21-880
Issue N Original
Instruction Manual
®
Diffstak
Mk2 Diffusion Pumps
Diffstak 63/150, 100/300, 160/700
and 250/2000, M-, P-, C- and F-models

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Questions and answers

LEE CLEMENTS
March 14, 2025

My diff heater is going up to 340 c which is to hot for the oil and normally between 170 & 200 ,Why is it doing this ,its cooled by water.

1 comments:
Mr. Anderson
March 14, 2025

The Edwards Diffstak 63/150 heater may be reaching 340°C instead of the expected 170°C to 200°C due to a failure in the cooling-water system. The manual states that the cooling-water temperature should be maintained below 25°C and that if the cooling fails, the thermal snap-switch (if fitted) may activate. If the cooling system is not functioning properly, the lack of heat dissipation could cause the heater to overheat. Additionally, if the pump is using polyphenyl ether (PPE) fluid without an interlocked cooling-fail thermal snap-switch, it may allow the temperature to rise excessively. Checking the cooling-water flow and ensuring the thermal protection systems are working correctly is recommended.

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Summary of Contents for Edwards Diffstak 63/150

  • Page 1 B344-21-880 Issue N Original Instruction Manual ® Diffstak Mk2 Diffusion Pumps Diffstak 63/150, 100/300, 160/700 and 250/2000, M-, P-, C- and F-models...
  • Page 2 Declaration of Conformity Edwards, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Diffstak 63 Diffstak 100 B34431976 B34433978...
  • Page 3 Declaration of Conformity Edwards, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Diffstak 160 Diffstak 250 B34831976 B34837976...
  • Page 4 P200-10-036 Issue A Materials Declaration  In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as ‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical Products: Product Labels Product...
  • Page 5: Table Of Contents

    Pump start-up ......................31 Re-admission of air to your vacuum system ................ 34 Re-evacuation of your vacuum system ................34 Pump shut-down ......................34 © Edwards Limited 2007. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Spares for Diffstak M- and P-model pumps ................. 52 Accessories ....................... 53 For return of equipment, complete the HS Forms at the end of this manual. Page ii © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 Position indicator connections (160/700P and 250/2000P only) ..........25 Schematic diagram of typical pneumatic circuit (P-model pumps only) ........28 Typical pumping system: Diffstak 63/150, 100/300 and 160/700 pumps ........32 Typical pumping system: Diffstak 250/2000 pumps ...............33 High-vacuum isolation-valve: Diffstak 63/150, 100/300 and 160/700 pumps ......... 39 High-vacuum isolation-valve: Diffstak 250/2000 pumps ............39...
  • Page 8 B344-21-880 Issue N This page has been intentionally left blank. Page iv © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 9: Introduction

    Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Diffstak Mk2 diffusion pumps. You must use the Diffstak pump as specified in this manual. Read this manual before you install and operate the pump. Important safety information is highlighted as WARNING and CAUTION instructions;...
  • Page 10: Description

    The pumps are designed for use in applications which require minimum pump down times when heavy vapour loads are pumped. Page 2 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 11: Construction

    The inlet-flange has an integral roughing pipeline into which a combined backing/ roughing-valve can be connected in the Diffstak 63/150, 100/300 and 160/700 pumps. The Diffstak 250/2000 is designed to use separate roughing and backing pipeline-valves. You may fit a vacuum gauge head to the coupling provided on the roughing pipeline. Housed within the inlet-flange is the low-impedance high-vacuum isolation butterfly-valve.
  • Page 12: Sectional View Of Valved Diffstak 63/150 Pump

    B344-21-880 Issue N Figure 1 - Sectional view of valved Diffstak 63/150 pump 1. High-vacuum isolation-valve 11. Backing spout 22. 3rd-stage jet assembly 2. Inlet-flange 12. Ejector jet 23. Pump-body 3. Roughing connection 13. Terminal-box 24. Water-cooling coil 4. Gauge connection (NW10) 14.
  • Page 13: Sectional View Of Valved Diffstak 100/300 Pump

    14. Terminal-block 23. Top-jet assembly 7. Tie-rod 15. Electrical cables 24. Baffle-cap 8. Backing connection 16. Heater 9. Backing condenser 17. Pump-boiler © Edwards Limited 2007. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 14: Sectional View Of Valved Diffstak 160/700 Pump

    7. Backing connection 16. 3rd-stage jet assembly 23. Fluid drain 8. Baffle condenser 17. Cooling-fail thermal switch 9. Backing spout mounting plate Page 6 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 15: Part Sectional View Of Valved Diffstak 250/2000 Pump

    7. Tie-rod 17. Cooling-fail thermal-switch 8. Backing connection mounting plate 9. Baffle condenser 18. Pump-body 10. Backing spout 19. High-vacuum isolation-valve © Edwards Limited 2007. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 16 B344-21-880 Issue N This page has been intentionally left blank. Page 8 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 17: Technical Data

    0.4 Nm 0.4 Nm For applications where maximum throughput is not required, the RV3 can be used. † P-model pumps only. © Edwards Limited 2007. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 18: C-Model And F-Model Pumps

    F-model 10 kg 20 kg Dimensions Figure 7 Pump fluid data Note: Edwards Material Safety Data Sheets for the following fluids are available on request. Fluid type Critical backing pressure Ultimate vacuum Santovac 5 0.6 mbar 6.0 x 10 3 x 10...
  • Page 19: Construction Materials

    110 to 125 V, 1-phase, 50/60 Hz B346-40-976 B348-40-976 210 to 225 V, 1-phase, 50/60 Hz B346-40-977 B348-40-977 230 to 250 V, 1-phase, 50/60 Hz B346-40-978 B348-40-978 © Edwards Limited 2007. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 20: Dimensions Of M-Model Diffstak Pumps (Mm)

    B344-21-880 Issue N Figure 5 - Dimensions of M-model Diffstak pumps (mm) 1. 63/150M 3. 160/700M 2. 100/300M 4. 250/2000M Page 12 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 21: Dimensions Of P-Model Diffstak Pumps (Mm)

    B344-21-880 Issue N Figure 6 - Dimensions of P-model Diffstak pumps (mm) 1. 63/150P 3. 160/700P 2. 100/300P 4. 250/2000P © Edwards Limited 2007. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 22: Dimensions Of C-Model Diffstak Pumps (Mm)

    B344-21-880 Issue N Figure 7 - Dimensions of C-model Diffstak pumps (mm) 1. 63/150C 3. 160/700C 2. 100/300C 4. 250/2000C Page 14 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 23: Installation

    You must clean the pump before you fill it with a fluid other than Santovac 5 (see Section 3.9). © Edwards Limited 2007. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 24: Locate The Pump

    Section 3.4.1 Diffstak inlet The ISO compatible inlet-flanges on the valved Diffstak 63/150, 100/300 and 160/700 pumps can be bolted to any flat, unscratched surface; use the Co-Seal supplied with the Diffstak to obtain a reliable vacuum seal (see Figure Seal the inlet-flange of Diffstak 250/2000 pumps with the trapped ‘O’...
  • Page 25: Inlet-Flange Fitting Details

    250/2000M or P M10 x 120 M10 x 110 Figure 8 - Inlet-flange fitting details 1. Inlet-flange 3. Stud 2. Fixing-hole 4. Bolt © Edwards Limited 2007. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 26 3. CF flange Figure 11 - C-model Diffstak inlet connection 1. Co-Seal 2. ISO tube/collar assembly 3. Claw clamp 4. Diffstak inlet-flange Page 18 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 27 Not required for C-model pumps; use claw clamps to bolt the pump ISO inlet-flange directly to the ISO tube and collar assembly. Bolts are not available from Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt thepump ISO inlet-flange directly to the ISO tube and collar assembly. Use 4 claw clamps for ISO63, ISO100 and ISO160 flanges.
  • Page 28: Diffstak 250/2000 Installation Details

    6 claw clamps for the ISO250 flange. Bolts are not available from Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt the pump ISO inlet-flange directly to the ISO tube and collar assembly.
  • Page 29: Backing And Roughing Connections

    We recommend that you use a Edwards combined roughing/backing-valve Model BRV as it is designed especially for the Diffstak 63/150, 100/300 and 160/700 pumps. You will have to use two separate valves (such as Edwards Model PV40) for selection of the roughing or backing mode of operation when you couple a Diffstak 250/2000 pump into your vacuum system.
  • Page 30: Cooling-Water Connections

    C for approximately 8 hours and then refit the heaters to the pump. 3. Check that the electrical supply voltage corresponds with the pump data plate. Page 22 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 31: Heater Electrical Connections

    3. Heater connection 4. Conduit adaptor 5. Earth (ground) connection 6. Radiation shield 7. Ceramic terminal-block 8. Nickel heater cables 9. Terminal-box © Edwards Limited 2007. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 32: Connect The Cooling-Fail Thermal Snap-Switch (Optional)

    The switch can be positioned at the end of the ejector-stage housing. Installation data is provided in the instruction manual supplied with the switch. Page 24 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 33: Connect The High-Vacuum Isolation-Valve Position Indicators (63/150P And 100/300P Only)

    © Edwards Limited 2007. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 34: Connect The Compressed-Air Supplies (P-Model Pumps Only)

    The level of leak tightness required will depend on the application of the system. You must leak-test the system to ensure the integrity of the system and its vacuum seals. Page 26 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 35: Fill The Pump With Fluid

    > 260 Decomposed Highly Potentially fluorocarbons aggressive fatal including materials. Perfluoro- hydrofluoric Poisonous and polyether acid caustic by inhalation and skin contact. © Edwards Limited 2007. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 36: Recommended Pump Fluids

    8. Diffstak high-vacuum isolation-valve (fail-safe 3. Filter closed installation) 4. Pressure regulator 9. Diffstak high-vacuum isolation-valve (fail-safe open 5. Lubricator installation) 6. Standard 5-port control-valve Page 28 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 37: Filling Procedure

    6. Refit the dipstick and ‘O’ ring then refit and tighten the knurled nut on the filler connection. © Edwards Limited 2007. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 38 B344-21-880 Issue N This page has been intentionally left blank. Page 30 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 39: Operation

    The temperature of the pump body can reach 250 The following sections are applicable to the Diffstak 63/150, 100/300 and 160/700 pumps which are operated in conjunction with a combined backing/roughing-valve to provide a fully valved system as shown in...
  • Page 40: Typical Pumping System: Diffstak 63/150, 100/300 And 160/700 Pumps

    B344-21-880 Issue N Figure 18 - Typical pumping system: Diffstak 63/150, 100/300 and 160/700 pumps 1. High vacuum system 6. Air-admittance valve 2. Air-admittance valve 7. Rotary backing pump 3. High vacuum gauge head 8. Diffstak pump 4. Combined roughing and backing-valve 9.
  • Page 41: Typical Pumping System: Diffstak 250/2000 Pumps

    7. Rotary backing pump 3. High vacuum gauge head 8. Backing-valve 4. Roughing-valve 9. Diffstak pump 5. Backing gauge head 10. High-vacuum isolation-valve © Edwards Limited 2007. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 42: Re-Admission Of Air To Your Vacuum System

    4. Turn off the cooling-water supply. Page 34 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 43: Maintenance

    Isolate the pump from the electrical supply and your vacuum system before you start work. Allow the pump to cool to a safe temperature before you start work: Leave Diffstak 63/150, 100/300 and 160/700 pumps for at least 20 minutes; leave Diffstak 250/2000 pumps for at least 45 minutes. Open the pump to atmospheric pressure when it is cool.
  • Page 44: Maintenance Plan

    5. Inspect the dipstick ‘O’ ring. Replace the ‘O’ ring if it is damaged or if thermal set has taken place. 6. Refit the dipstick and ‘O’ ring. Page 36 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 45: Inspect The Pump Fluid (And Drain If Necessary)

    2. Remove the screws which secure the valve-plate to the shaft and detach the valve-plate (see Figures and 21). 3. Carefully withdraw the valve-shaft complete with its lever from the valve-body. © Edwards Limited 2007. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 46: Remove The High-Vacuum Isolation-Valve (P-Model Pumps)

    5.5.4 Dismantle the pump 1. On Diffstak 63/150 pumps, slacken the single screw which retains the baffle-cap strap; on other pumps, slacken the two screws which retain the baffle-cap strap. Rotate the strap to release it. 2. Withdraw the baffle-cap from the Diffstak; use the grips provided to ease the baffle-cap through the bore of the valve-body.
  • Page 47: High-Vacuum Isolation-Valve: Diffstak 63/150, 100/300 And 160/700 Pumps

    B344-21-880 Issue N Figure 20 - High-vacuum isolation-valve: Diffstak 63/150, 100/300 and 160/700 pumps 1. Valve-shaft 4. Valve-plate 2. Valve-shaft ‘O’ rings 5. Blanking-plate 3. Screw (3 off) 6. Valve-plate seal Figure 21 - High-vacuum isolation-valve: Diffstak 250/2000 pumps 1. Needle roller-bearing 5.
  • Page 48: Inspect And Clean The Interior

    On Diffstak 63/150 pumps: the baffle-cap strap is secured by one screw at the centre of the strap. On Diffstak 100/300, 160/700 and 250/2000 pumps: the baffle-cap strap is secured by two screws.
  • Page 49: Pneumatic Actuator For The Isolation-Valve: Diffstak 63/150P And 100/300P Pumps

    1. Circlip 2. Pneumatic actuator 3. Mounting bracket 4. Retaining screws 5. Valve closed microswitch 6. Valve-body 7. Valve open microswitch © Edwards Limited 2007. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 50: Clean The Radiation Shield

    On Diffstak 250/2000 pumps: Allow the pump to cool for at least 45 minutes. On Diffstak 63/150, 100/300 and 160/700 pumps: Allow the pump to cool for at least 20 minutes. 3. Wipe the radiation shield with a soft cloth (and use a suitable cleaning solution if necessary).
  • Page 51: Lubricate/Inspect The High-Vacuum Isolation-Valve (M- And P-Model Pumps)

    Lightly lubricate replacement valve-plate seals with Fomblin RT15 grease. 5. Reassemble the valve and refit the pump as detailed in Section 5.5.6. © Edwards Limited 2007. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 52: Replace The Pump Heater(S)

    B344-21-880 Issue N Replace the pump heater(s) 5.8.1 Diffstak 63/150 and 100/300 pumps Use the following procedure to replace a heater on Diffstak 63/150 and 100/300 pumps: 1. Isolate the Diffstak from the electrical supply. 2. Refer to Figure 25. Remove the retaining screws and detach the cover from the terminal-box (1). Disconnect the incoming electrical supply cables and the earth (ground) cable at the terminal-block.
  • Page 53: Diffstak 160/700 And 250/2000 Pumps

    Figure 26 - Heater assembly: Diffstak 160/700 and 250/2000 pumps 1. Terminal-box 5. Radiation shield 2. Heater 6. Clamp plates 3. Nut 7. Pump boiler 4. Nut © Edwards Limited 2007. All rights reserved. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 54: Check The Heater Securing Nuts

    10. Apply a suitable thread sealant (such as Loctite 222e) to the clamp screw (7) and tighten the clamp screw to a torque of 0.4 Nm. Page 46 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 55 1. Position indicator (valve closed) 5. Gap 2. Gap 6. Position indicator (valve open) 3. Dovetail groove 7. Clamp screw 4. Position indicator wires © Edwards Limited 2007. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 56: Fault Finding

    Are the ‘O’ ring seals excessively Check and rectify. lubricated ? Is there excessive fluid charge ? Drain off, as necessary. Page 48 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 57: Storage And Disposal

    Fluoroelastomers which may have been subjected to temperatures above 315 C (see Section 5.1) Components which have been contaminated with dangerous process substances. © Edwards Limited 2007. All rights reserved. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 58 B344-21-880 Issue N This page has been intentionally left blank. Page 50 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 59: Service, Spares And Accessories

    The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and Item Number of your equipment Serial number (if any) Item Number and description of part.
  • Page 60: Spares Common To All Diffstak Pumps

    One heater of each power rating is required for the 160/700 and 250/2000 Diffstak pumps. ▲ Pack of 5 ✝ Pack of 2 ◆ P-model pumps only Page 52 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 61: Accessories

    110 V a.c., 1-phase, 50/60 Hz H062-00-136 230 V a.c., 1-phase, 50/60 Hz H062-00-137 Co-Seal, polymer/fluoroelastomer ✝ Trapped ‘O’ ring assembly © Edwards Limited 2007. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 62 B344-21-880 Issue N This page has been intentionally left blank. Page 54 © Edwards Limited 2007. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 63 Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the procedure in HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to Edwards. Note: If we do not receive a completed HS2 form, we will not accept the return of the...
  • Page 64 edwardsvacuum.com...

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