Edwards Cryo-Cooled Diffstak CR63/150 Instruction Manual

Mk2 diffusion pumps

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Cryo-Cooled Diffstak CR63/150, CR100/300, CR160/700 and

Description

M-model CR63/150 Cryo-Cooled Diffstak Pump

M-model CR100/300 Cryo-Cooled Diffstak Pump

M-model CR160/700 Cryo-Cooled Diffstak Pump

M-model CR250/2000 Cryo-Cooled Diffstak Pump

P-model CR63/150 Cryo-Cooled Diffstak Pump

P-model CR100/300 Cryo-Cooled Diffstak Pump

P-model CR160/700 Cryo-Cooled Diffstak Pump

P-model CR250/2000 Cryo-Cooled Diffstak Pump

Instruction Manual

Cryo-Cooled Diffstak

CR250/2000, M- and P-models

Mk2 Diffusion Pumps

110 to 125 V, 1-phase,

210 to 225 V, 1-phase,

50/60 Hz

B344-37-976

B346-37-976

B348-37-976

B350-37-976

B344-38-976

B346-38-976

B348-38-976

B350-38-976

Issue J Original

Item Numbers

230 to 250 V, 1-phase,

50/60 Hz

B344-37-977

B344-37-978

B346-37-977

B346-37-978

B348-37-977

B348-37-978

B350-37-977

B350-37-978

B344-38-977

B344-38-978

B346-38-977

B346-38-978

B348-38-977

B348-38-978

B350-38-977

B350-38-978

B348-00-880

50/60 Hz

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Summary of Contents for Edwards Cryo-Cooled Diffstak CR63/150

Page 1 B348-00-880 Issue J Original Instruction Manual ® Cryo-Cooled Diffstak Mk2 Diffusion Pumps Cryo-Cooled Diffstak CR63/150, CR100/300, CR160/700 and CR250/2000, M- and P-models Item Numbers Description 110 to 125 V, 1-phase, 210 to 225 V, 1-phase, 230 to 250 V, 1-phase,...
Page 2 Declaration of Conformity We, Edwards, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) Cryo-Cooled Diffstak Mk2 Diffusion Pumps: B344-37-976 B346-37-976 B348-37-976 B350-37-976 B344-37-977...
Page 3: Table Of Contents
Re-admission of air to your vacuum system ................28 Re-evacuation of your vacuum system ................28 Pump shut-down ......................29 Empty the liquid nitrogen reservoir ..................29 Maintenance ..................31 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 4 Storage ........................45 Disposal ........................45 Service, spares and accessories .............. 47 Introduction ......................47 Service ........................47 Spares ........................47 Accessories .......................47 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 5 Vapour pump fluid thermal breakdown ................22 Maintenance plan ....................... 32 Fault finding ......................44 Pump fluid spares ....................... 48 Pump specific spares ....................48 Accessories .......................49 © Edwards Limited 2008. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 6 Ausimont SpA. ® Santovac is a registered trademark of Santovac Fluids Inc. Viton™ is a trademark of DuPont Performance Elastomers L.L.C. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7: Introduction
Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Cryo-Cooled Diffstak Mk 2 Diffusion Pumps. You must use the Cryo-Cooled Diffstak pumps as specified in this manual. Read this manual before you install and operate the pump. Important safety information is highlighted as WARNING and CAUTION instructions;...
Page 8: Description
The inlet-flange has an integral roughing pipeline, to which an Edwards BRV combined backing/roughing-valve can be connected in the Diffstak CR63/150, CR100/300 and CR160/700 pumps. The Diffstak CR250/2000 is designed to use separate roughing and backing pipeline-valves.
Page 9: Part-Sectional View Of Cryo-Cooled Diffstak Mk 2 Pump
7. First-stage jet 17. Drain-plug 8. Tie-rod 18. Thermal snap-switch mounting plate 9. Backing connection 19. Liquid nitrogen reservoir 10. Backing condenser © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 10: Principle Of Operation
The ejector jet also purges the fluid of any contaminants as it returns to the boiler and at the same time ensures a high critical backing pressure even when you use low vapour pressure fluids. Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 11: Technical Data
Position indicator enclosure protection IP67 IP67 IP22 IP22 P-model pumps only. † On position indicators on CR63/150 and CR100/300 pumps only. © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12: Pump Fluid Data
B348-00-880 Issue J Pump fluid data Note: Edwards Material Safety Data Sheets for the following fluids are available on request. Table 3 - Pump fluid data ® Recommended pump fluid Santovac Pump fluid type Flash point Auto-ignition point Molecular weight ®...
Page 13: Construction Materials
Nickel plated mild steel and machined aluminium Pump-body Stainless steel unitary construction Water-cooling coils Stainless steel CR63/150, CR100/300, CR250/2000 Mild steel CR160/700 Stainless steel Seals Viton™/fluoroelastomer © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 14 B348-00-880 Issue J Figure 2 - M-model Diffstak pump dimensions (mm) 1. CR63/150M 2. CR100/300M 3. CR160/700M 4. CR250/2000M Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 15 B348-00-880 Issue J Figure 3 - P-model Diffstak pump dimensions (mm) 1. CR63/150P 2. CR100/300P 3. CR160/700P 4. CR250/2000P © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17: Installation
The Diffstak pump is designed to operate with the inlet-flange horizontal and at the top. Locate the pump within practical working distance from suitable electrical supplies, cooling-water and compressed-air supplies (where applicable). © Edwards Limited 2008. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 18: Vacuum Connections
Typical configurations of a vacuum system in which a Diffstak pump is installed are shown in Figures and 13. The Edwards components required to connect the backing and roughing pipelines are shown in Figures and 7. Some of these components are supplied in the fitting-kit; the supplied components are identified in the keys to these figures.
Page 19: Diffstak Inlet Connection (Cr63/150, Cr100/300 And Cr160/700 Only)
4. ISO flange 5. Rotatable flange Figure 5 - Inlet-flange fitting details 1. Diffstak inlet-flange 2. Fixing-hole 3. Stud 4. Bolt © Edwards Limited 2008. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 20 BRV valve. Only required for P-model pumps, to control the high-vacuum isolation-valve. Supplied with the pump (1 off of each component) Page 14 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21: Diffstak Cr250/2000 Installation Details
2 PVPK valves Only required for P-model pumps, to control the high-vacuum isolation-valve. Supplied with the pump (1 off of each component) © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 22: Backing And Roughing Connections
We recommend that you use an Edwards combined roughing/backing-valve Model BRV as it is designed especially for the Diffstak CR63/150, CR100/300 and CR160/700 pumps. You will have to use two separate valves (such as Edwards Model PV40 valves) for selection of the roughing or backing mode of operation when you couple a Diffstak CR250/ 2000 pump into your vacuum system.
Page 23: Cooling-Water Connections
180 °C for approximately 8 hours and then refit the heaters to the pump. 3. Check that the electrical supply voltage corresponds with the pump data plate. © Edwards Limited 2008. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 24: Connect The Cooling-Fail Thermal Snap-Switch (Optional)
A typical electrical circuit with the thermal snap-switch connected in-series with the Diffstak heater is shown in Figure Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25: Connect The Pump-Ready Thermal Snap-Switch (Optional)
The switch can be positioned at the end of the ejector-stage housing. Installation data is provided in the instruction manual supplied with the thermal snap-switch. © Edwards Limited 2008. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 26: Connect The High-Vacuum Isolation-Valve Position Indicators (Cr63/150P And Cr100/300P Pumps Only)
Page 20 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 27: Connect The Compressed-Air Supplies (P-Model Pumps Only)
The level of leak tightness required will depend on the application of the system. You must leak-test the system and seal any leaks found to ensure the integrity of the system and its vacuum seals. © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 28: Fill The Pump With Fluid
> 260 Decomposed Highly aggressive Potentially polyether fluorocarbons materials. fatal including Poisonous and hydrofluoric caustic by acid inhalation and skin contact. Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29: Recommended Pump Fluids
2. Remove two of the three caps on the filler connections and fit two of the lengths of tube to the connections. Route the tubes away from any areas of the pump where people will work. © Edwards Limited 2008. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 31: Operation
If you open the valve too quickly, you can stall the pump. 8. Fill the liquid nitrogen reservoir as described in Section 4.3. © Edwards Limited 2008. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 32: Typical Pumping System: Diffstak Cr63/150, Cr100/300 And Cr160/700 Pumps
4. Combined roughing and backing-valve 5. Backing gauge head 6. Air-admittance valve 7. Rotary backing pump 8. Diffstak pump 9. High-vacuum isolation-valve Page 26 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 33: Typical Pumping System: Diffstak Cr250/2000 Pumps
4. Roughing-valve 5. Backing gauge head 6. Air-admittance valve 7. Rotary backing pump 8. Backing-valve 9. Diffstak pump 10. High-vacuum isolation-valve © Edwards Limited 2008. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 34: Fill Or Refill The Liquid Nitrogen Reservoir
3. When a system pressure of 0.3 mbar (30 Pa) or lower is reached, select ‘Backing’. 4. Open the high-vacuum isolation-valve slowly; if you open the valve too quickly, you can stall the pump. Page 28 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Pump Shut-Down
6. Connect one end of a suitable tube (3) to the gas supply which you will use to pressurise the reservoir (4). © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 36 Figure 14 - Empty the liquid nitrogen reservoir 1. Drain-tube 2. Filler connection (blanked off) 3. Pressurising gas supply tube 4. Pressurising gas supply 5. Condensate drain plug Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 37: Maintenance
310 °C and above. These breakdown products are very dangerous. The Diffstak pump may have overheated if the pump has been misused or if it has malfunctioned. Edwards Material Safety Data Sheets for the fluorinated materials used in the Diffstak pump are available on request.
Page 38: Maintenance Plan
5. Inspect the dipstick O-ring. Replace the O-ring if it is damaged or if thermal set has taken place. 6. Refit the dipstick and O-ring. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 39: Clean The Cooling-Coil
4. Disconnect the cooling-water supply and return pipelines, the electrical supply to the heater and the backing, roughing and system connections. © Edwards Limited 2008. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 40: Remove The High-Vacuum Isolation-Valve (M-Model Pumps)
Figure 16 - High-vacuum isolation-valve: CR250/2000 pump 1. Needle roller-bearing 2. Valve-shaft O-rings 3. Valve-plate 4. Valve-shaft 5. Screw (4 off) 6. Blanking-plate 7. Valve-plate seal Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 41: Remove The High-Vacuum Isolation-Valve (P-Model Pumps)
On Diffstak CR250/2000 pumps : Unscrew the top-jet cap then remove the second and third-stage sections separately. © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 42: Pneumatic Actuator For The Isolation-Valve: Cr63/150P And Cr100/300P Pumps
1. Circlip 2. Pneumatic actuator 3. Mounting bracket 4. Retaining screws 5. Valve closed microswitch 6. Valve-body 7. Valve open microswitch Page 36 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 43: Cryo-Cooling System
5. O-ring 6. Inner container 7. Blank plate 8. Cooled fin 9. Liquid nitrogen reservoir 10. Filler connection (one of three) © Edwards Limited 2008. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 44: Inspect And Clean The Interior
O-rings. Ensure that all O-rings are dust-free before reassembly. 8. Reconnect the Diffstak pump to your vacuum system. Fill the pump with fluid as detailed in Section 3.9. Page 38 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 45: Clean The Radiation Shield
Lightly lubricate replacement valve-plate seals with Fomblin RT15 grease. 5. Reassemble the valve and refit the pump as detailed in Section 5.7.6. © Edwards Limited 2008. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 46: Replace The Pump Heater(S)
10 to 12 N m. 8. Reconnect the electrical supply cables and the earth (ground) connection. Refit the cover to the terminal-box (1). Page 40 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 47: Heater Assembly: Diffstak Cr63/150 And Cr100/300 Pumps
Figure 22 - Heater assembly: Diffstak CR160/700 and CR250/2000 pumps 1. Terminal-box 5. Radiation shield 2. Heater 6. Clamp plates 3. Nut 7. Boiler 4. Nut © Edwards Limited 2008. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 48: Check The Heater Securing Nuts
10. Apply a suitable thread sealant (such as Loctite 222e) to the clamp screw (7) and tighten the clamp screw to a torque of 0.4 N m. Page 42 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 49 1. Position indicator (valve closed) 2. Gap 3. Dovetail groove 4. Position indicator wires 5. Gap 6. Position indicator (valve open) 7. Clamp screw © Edwards Limited 2008. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 50: Fault Finding
Have the O-ring seals been Check and rectify. excessively lubricated ? Is there too much fluid in the pump ? Drain off, as necessary. Page 44 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 51: Storage And Disposal
Fluoroelastomers which may have been subjected to temperatures above 260 °C (see Section 5.1) Components which have been contaminated with dangerous process substances. © Edwards Limited 2008. All rights reserved. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 53: Service, Spares And Accessories
Edwards products, spares and accessories are available worldwide from Edwards companies and our network of distributors. Please refer to the back page of this manual or to www.edwardsvacuum.com for contact information. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and Item Number of your equipment.
Page 54 One heater of each power rating is required for the CR160/700 and CR250/2000 Diffstak pumps. † Pack of 5. ‡ Pack of 2. P-model pumps only. Page 48 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 55 110 V a.c., 1-phase, 50/60 Hz H062-00-136 230 V a.c., 1-phase, 50/60 Hz H062-00-137 Co-Seal, polymer/fluoroelastomer. † Trapped O-ring assembly. © Edwards Limited 2008. All rights reserved. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 59 Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the procedure in HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to Edwards. Note: If we do not receive a completed HS2 form, we will not accept the return of the...
Page 60 edwardsvacuum.com...

Edwards Cryo-Cooled Diffstak CR63/150 Instruction Manual

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