○Conversion formula of the process data and flow measurement value
(1) Conversion formula from the process data to the flow measurement value:
Pr = a × (PD) + b
(2) Conversion formula from the flow gauge measurement value to the process data:
(PD) = (Pr – b) / a
Pr: Flow measurement value and pressure set value
PD: Flow measurement value (process data)
a: Inclination
b: Intercept
[Inclination and intercept to the unit specification]
Series
Unit
L/min
PF3A7#H
cfm
[Calculation example]
(1) Conversion from the process data to the flow measurement value
(For PF3A703H series, unit L/min, flow range 3000 L and PD = 2800)
Pr = a × (PD) + b
= 0.75 × 2800 + 0
= 2100 [L/min]
(2) Conversion from the flow measurement value to the process data
(For PF3A706H series, unit L/min, flow range 6000 L and Pr = 5250 [L/min])
(PD) = (Pr - b) / a
= [5250 - 0] / 1.50
= 3500
Flow range
Inclination a
3000 L
0.75
6000 L
1.50
12000 L
3.00
3000 L
0.026475
6000 L
0.05295
12000 L
0.106
-73-
Intercept b
0
0
0
0
0
0
No.PF※※-OMX0002