EBARA EV-A10 Instruction Manual page 14

3
3.2 Piping ............................................................................................................. 30
3.2.1
3.3 Electrical Wiring............................................................................................ 31
3.3.1
3.3.2
4. Operation Panel ............................................................................................... 38
4.1 Operation Panel Outline............................................................................... 38
4.2 Operation Panel Display .............................................................................. 41
5. Operation .......................................................................................................... 43
5.1 Before Starting.............................................................................................. 43
5.2 START / STOP ............................................................................................... 44
5.3 Operation when momentarily power failure happens.............................. 46
5.4 Gas Ballast .................................................................................................... 47
6. Maintenance and Inspection .......................................................................... 48
6.1 Routine Inspection ....................................................................................... 48
6.2 Vacuum and Exhaust Piping ....................................................................... 48
6.3 Lubrication Oil .............................................................................................. 49
6.4 Maintenance Parts List ................................................................................ 52
6.5 List of Wastes During Maintenance ........................................................... 52
6.6 Repair and Service ....................................................................................... 53
6.7 Overhaul ........................................................................................................ 53
7. Storage / Disposal ........................................................................................... 53
7.1 Storage........................................................................................................... 53
7.2 Disposal ......................................................................................................... 53
8. Disconnection and Transportation................................................................ 54
9. Troubleshooting .............................................................................................. 56
9.1 Troubleshooting (1) : Basic trouble ........................................................... 57
9.2 Troubleshooting (2) : ALARM ..................................................................... 57
---------------------------------------------------------------------------------------------------------------------
[Attachment Data]
Appendix 1 :
Appendix 2 :
Appendix 3 :
Appendix 4 :
Appendix 5 :
Information of Global Network
308
Vacuum and Exhaust Piping................................................................ 30
Power Supply Wiring ............................................................................ 31
Control Signal Wiring ........................................................................... 35
Material Safety Data Sheet of Lubricant oil (JPN)
Material Safety Data Sheet of Lubricant oil (ENG)
Overhaul / Repair Request form (JPN)
Overhaul / Repair Request form (ENG)
Leak Check procedure
(%$5$
&25325$7,21