EBARA EV-A10 Instruction Manual page 34

3
&RQQHFW WKH SRZHU FRQQHFWRU IRU WKH PDLQ SRZHU VXSSO\ 3KDVH 9 
)LJ  7DEOH  DQG  VKRZV WKH SLQ DVVLJQPHQW RI WKH SRZHU FRQQHFWRU
&RQQHFWRU SLQ LV D VFUHZ IL[ W\SH 3OHDVH PDNH VXUH WR WLJKWHQ WKH VFUHZ HQRXJK WR IL[ WKH
FRQQHFWRU SLQ
3OHDVH ZLUH WKH FRQQHFWRU SLQ E\ WKH VSHFLDOL]HG WRRO
1
GND
Fig. 3.3 Power Supply Receptacle
(As seen from connecting side)
308
Table 3.2 Receptacle and Plug Specifications
5HFHSWDFOH W\SH
5HFHS 0DQXIDFWXUH
$GDSWHG SOXJ W\SH
6XLWDEOH ZLUH
3RZHU FDSDFLW\ >N9$@
2
3
Table 3.1 Pin Assignment of
Power Supply Receptacle
& &  
$PSKHQRO
& '  
$:* 

DQG +] 
No. Phase
1 R
2 S
3 T
GND GND
(%$5$
&25325$7,21