Emergency Stop; Restart The Pump After An Emergency Stop Or Automatic Shut-Down; Single Equipment Monitor (Sem) - Edwards iH80 Instruction Manual

A590-00-880 Issue D
4.6

Emergency stop

Note: The emergency stop switch is not an electrical isolator.
Note: The use of emergency stop will not automatically shut down the load lock pump (if fitted); you must shut
down the load lock pump separately.
To shut down the iH system in an emergency, press the emergency stop switch
can operate the emergency stop controls in your own control system if you have connected your emergency stop
circuit to the iH system as described in
When emergency stop is selected:
The pump (and the booster pump) is switched off.
The solenoid-valve(s) in the Gas Module close, to switch off the supply of nitrogen to the pump.
The solenoid-valve(s) in the temperature control manifold(s) de-energise with loss of temperature control.
The Pump Display Terminal will display 'STOP ACTIVATED'. (If connected)
The Running LED will go off.
The Alarm LED illuminates.
4.7 Restart the pump after an emergency stop or automatic shut-
down
Note: If the iH system has automatically shut down because of high pump power, check that the pump is free to
rotate before you restart the iH system: refer to the Web.
If you have used the emergency stop switch on the front panel to shut down the iH system, you must reset the
emergency stop switch before you can restart the iH system. Turn the emergency stop switch to reset it, then restart
the iH system as described in
If the iH system has been automatically shut down because of an alarm condition, the alarm condition must be
rectified before you can restart the iH system. Restart the iH system as described in
4.8

Single equipment monitor (SEM)

Ensure that you use the correct configuration setpoints for your application. If you do not, the iH system may
be damaged during operation.
If there is an SEM connected to your iH system, you are able to download configuration sets, which contain preset
configuration values, for example setpoints. Contact Edwards or go to the Web for more details.
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Section 3.10.
Section 4.1.
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