A590-00-880 Issue D
5.5
Replace a fuse ...........................................................................................................34
5.6
6
6.1
Transportation ..........................................................................................................35
6.2
Storage ................................................................................................................... 35
6.3
Disposal ................................................................................................................... 35
7
7.1
Introduction ............................................................................................................. 37
7.2
Service .................................................................................................................... 37
7.3
Ordering accessories ...................................................................................................37
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure
1
iH applications chart .................................................................................................... 2
2
Priority of control ........................................................................................................ 3
3
4
5
Top view of pump ........................................................................................................ 5
6
The front panel controls ................................................................................................ 5
7
8
9
10
11
Tables
Table
1
Technical data iH80, iH600 and iH1000 .............................................................................. 7
1
Technical data iH160 and iH1800 ..................................................................................... 8
2
Technical data ........................................................................................................... 8
3
Electrical data 200-208 V 50 Hz-230 V 60 Hz ........................................................................ 9
3
Electrical data 380-415 V 50 Hz-460 V 60 Hz ........................................................................ 9
4
Centre of gravity and levelling foot loads (Refer to
5
iH connector types ......................................................................................................11
6
Technical data ..........................................................................................................12
7
Safety sensors ...........................................................................................................29
8
Accessories ............................................................................................................... 37
Associated publications
Publication title
Vacuum Pump and Vacuum System Safety
Semiconductor Pumping Application Guide
Page ii
Figure
7) ...................................................10
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Page
Page
Publication number
P300-20-000
P411-00-090