Edwards iH80 Instruction Manual page 2

Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Standard
iH80 A590-00-xxx
iH600 A590-20-xxx
iH1000 A590-30-xxx
iH160 A590-10-xxx
iH1800 A590-40-xxx
iH1800 NRV A590-50-xxx
iH interface Module fitting kit
iH enclosure extraction fan (for iH80 and iH600 only)
iH Light Duty exhaust check valve
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996, A1: 2009
EN61010-1: 2001
EN 61326-1: 2006
UL61010A: 2002
SEMI S2-93A
and fulfils all the relevant provisions of
2006/42/EC
2006/95/EC
2004/108/EC
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Sia Abbaszadeh, Chief Technical Officer
This product has been manufactured under a quality system registered to ISO9001
HTX
A590-12-xxx
A590-42-xxx
A590-52-xxx
Compressors and Vacuum Pumps. Safety Requirements.
Vacuum Pumps
Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
Environmental Health and Safety Guideline for semiconductor
Manufacturing Equipment.
Machinery Directive
Low Voltage Directive
Electromagnetic Compatibility (EMC) Directive
Where xxx is as follows:
908 – 460V, 60Hz, 3-phase
945 – 200/208V, 50/60Hz, 3-phase
946 – 380/415V, 50Hz, 3-phase
957 – 230V, 60Hz, 3-phase
A505-35-000
A505-39-000
A505-56-000
9 December 2009
Date and Place