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Turbo-V 70
Controller
Model 969-9507
87-900-869-01 (D)
MAY 2005
vacuum technologies
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE ISTRUCCIONES
MANUAL DE ISTRUÇÕES
BEDRIJFSHANDLEIDING
ISTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
Ο∆ΗΓΙΕΣ ΧΡΗΣΕΩΣ
FELHASZNÁLÓI KÉZIKÖNYV
PODRECZNIK INSTRUKCJI
NÁVOD K POUŽITÍ
NÁVOD NA OBSLUHU
PRIROČNIK ZA NAVODILA
INSTRUCTION MANUAL
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Related Manuals for Varian Turbo-V 70
Summary of Contents for Varian Turbo-V 70
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 70 BEDIENUNGSHANDBUCH Controller NOTICE DE MODE D’EMPLOI MANUAL DE ISTRUCCIONES MANUAL DE ISTRUÇÕES Model 969-9507 BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA Ο∆ΗΓΙΕΣ ΧΡΗΣΕΩΣ FELHASZNÁLÓI KÉZIKÖNYV PODRECZNIK INSTRUKCJI NÁVOD K POUŽITÍ NÁVOD NA OBSLUHU PRIROČNIK ZA NAVODILA...
- Page 2 Turbo-V 70 Controller...
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Page 5: Navodila Za Uporabo
Controller krmi črpalke serije Turbo-V 70 (s 10-faznim postopkom) med pogonom in nadzoruje napetost ter električni tok v sorazmerju s hitrostjo, ki jo doseže črpalka. Controller vsebuje celotno električno vezje, ki je potrebno za avtomatično delovanje črpalke serije Turbo-V 70. - Page 6 črpalki. OPOMBA Model controllera 969-9507 dobite brez priklju č nega kabla za č rpalke. Kabel lahko naro č ite kot dodatek pri firmi Varian; podrobnejše informacije najdete odstavku "Accessories and spare parts" v dodatku "Technical Information". Kabel morate priklju č iti na eni 1.
- Page 7 NAVODILA ZA UPORABO Leva ploš č a Desna ploš č a 1. Izhodni konektor logičnih signalov (spajalni konektor s zapiralnim mostičkom). 2. Izhodni konektor logičnih in nadzornih signalov toka črpalke. 3. Izhodni močni konektor (24 Vcc za hladilni ventilator črpalke). 4.
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Page 8: Obvestilo O Napaki
NAVODILA ZA UPORABO V slučaju okvare, se lahko obrnite servisu Varian ali OBVESTILO O NAPAKI "Varian advance exchange service", ki Vam stavlja na V nekaterih slučajih kvara pokaže električno vezje razpolago obnavljenega controller-a. avtodiagnoze controller-a nekaj obvestil o napakah kot so opisane v spodnji tabeli. -
Page 9: General Information
(within steps) Turbo-V 70 pump during the starting phase by controlling the voltage and current respect to the speed reached by the pump. It incorporates all the facilities required for the automatic operation of the Turbo-V 70 pump series. -
Page 10: Installation
INSTRUCTIONS FOR USE INSTALLATION WARNING! WARNING! To avoid injury to personnel and damage to the The Turbo-V controller must be powered with 3-wire equipment, if the pump is laying on a table make sure it power cord (see orderable parts table) and plug is steady. -
Page 11: Use Procedure
MAINTENANCE Starting the Pump The Turbo-V 70 series controller does not require any maintenance. Any work performed on the controller To start the pump press the START pushbutton on the must be carried out by authorized personnel. -
Page 12: Error Messages
INSTRUCTIONS FOR USE When a fault has occurred it is possible to use the ERROR MESSAGES Varian repair service. Replacement controllers are For a certain type of failure, the controller will self- available on an advance exchange basis through diagnose the error and the messages described in the Varian. -
Page 13: Turbo-V 70 Controller Description
TURBO-V 70 CONTROLLER DESCRIPTION (50-60 Hz) AC mains supply into a 3-phase, low The controller, factory set for 120 Vac, 50-60 Hz input voltage, medium frequency output which is required to voltage, is a solid-state frequency converter which is power the Turbo-V pump. -
Page 14: Controller Specifications
47 to 63 Hz Power 350 VA maximum Output: CONTROLLER OUTLINE 54 Vac nominal ±10%, Voltage The outline dimensions for the Turbo-V 70 controllers 3-phase are shown in the following figure. 1250 Hz, ±2% Frequency Power 150 W maximum Operating 0 °C to +40 °C... -
Page 15: Power Interconnections
TECHNICAL INFORMATION Inspect the controller for any shipping damage. POWER INTERCONNECTIONS The Turbo-V 70 controller model is 969-9507 is factory- Connection J7 - 120 Vac Connector set for 120 Vac operation. The 120 Vac, 1 A maximum (independent of line... -
Page 16: Logic Interconnections
NOTE must shorted allow Turbo-V 70 PCB pump to start if no interlock contact is connected. If, after starting the pump, the interlock contact opens, it has no effect on the operation and the pump continues to turn. The following figure shows a typical contact logic input... - Page 17 TECHNICAL INFORMATION Connection J2 - Logic Output Interconnections DESCRIPTION 7-14 R2 signal 24 V, 60 mA, optically isolated output (pin 14 positive, pin 7 negative). The output Voltage will be present upon the programmed condition delay YES or delay NO (see the cycle diagram in the following pages).
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Page 18: Controller-To-Pump Connection
The communication port mating connector is supplied with the RS 232 PCB (AMP/Cannon or equivalent 15- NOTE pin "D" type male connector). Varian cannot guarantee compliance with The external cable (not supplied) between the host regulations for radiated emissions unless all external computer and the controller doesn’t require any... -
Page 19: Rs 232 Communication Descriptions
Message • "E" = Request for operational parameters • "F" = Pump times zeroing When the Request is "A, "B”, "C", "D", "F", the Turbo-V 70 • "G" = Parameters reading controller will Answer the ACK or NACK. • "H" = Parameters writing •... - Page 20 Answer will contain a string of 11 characters with the following type: following parameters: BYTES MEANING "H" + ..data ..+ CRC Cycle time Pump life 9-10 Cycle number On request a sample program in QBasic language is available by Varian. 87-900-869-01 (D)
- Page 21 B U T T O N V controller. NOTE NOTE When the Turbo-V 70 pump is baked by a membrane If the pump is not connected, the display will be as pump, the Soft Start mode should be deselected. follows:...
- Page 22 TECHNICAL INFORMATION X X X X C Y C L E X X X X X m NOTE P U M P X X X X X h After pressing the START push-button, if the P1 connector is not in place with the link or the external interlock connections are open, the display will be as shown in the following figure.
- Page 23 TECHNICAL INFORMATION The display shows: NOTE The Soft Start mode may be deselected/selected only R S 2 3 2 H O S T P R I when the pump is stopped. S E L E C T I O N : X X X X X If necessary press CYCLE NUMBER to select YES or NO, then enter the selection by pressing the PUMP...
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Page 24: Monitor Relay Programming
TECHNICAL INFORMATION With connected, bidirectional Monitor Relay Programming communication is established by selecting HOST. Data • The display shows: are sent to an external computer every time the external computer asks for the values. S P E E D T H R E S H O L D The data available are: S E L E C T I O N : X X K R P M... - Page 25 TECHNICAL INFORMATION Cycle diagram When the last digit is entered, the display will be as where: shown in the following figure. XXX = YES or NO. D E L A Y E V E N A F T E R By pressing the CYCLE NUMBER push-button, select YES if relay R2 must operate only after the T H R E S H O L D :...
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Page 26: Reset Command
TECHNICAL INFORMATION • Reset Command Press the START push-button (or use the remote or RS 232 start signal), and the display shows: • The display shows: S O F T S T A R T P U M P X X X X X h R E S E T ? X X X where:... - Page 27 TECHNICAL INFORMATION • Operating the Pump If the Soft Start mode has been deselected the display will change and shows: After the starting period, if the system has a vacuum leak or the pressure in the pump/chamber is high (from P U M P S T A R T 1 mbar to atmosphere), the pump continues to operate...
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Page 28: Power Failure
TECHNICAL INFORMATION The pump reaches the Normal high speed, then When the low speed mode is deselected, the pump decrease the speed to the low speed value and the starts to accelerate to its rotational speed. display shows: The display shows: A P P R O A C H N O R M A L O P E R A T... - Page 29 TECHNICAL INFORMATION Remote Control Mode Operation RS 232 Control Mode Operation If remote signals are used to operate the controller, it If the RS 232 option is installed and the controller has must be programmed for remote operation (see been programmed for RS 232 operation, the controller paragraph "FRONT/REMOTE/232 Selection")
- Page 30 TECHNICAL INFORMATION Verify that systems has no leaks than press STOP ERROR MESSAGES RESET pushbutton twice to start the pump. For a certain type of failure, the controller will self- diagnose the error and the following messages will be NOTE displayed if the hand-held terminal is connected.
- Page 31 − 54 Vdc ±10% between TP3(-) and TP5(+) − 24 Vdc ±15% on the fan connector. Since no operation can be carried out, contact VARIAN. b) AC three-phase output voltage test On the pump connector connect the DVM in turn between: pins B and C, B and D, C and D.
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Page 32: Pump Over-Temperature Test
TECHNICAL INFORMATION − Disconnect the potentiometer, set it to 10 KΩ, and then reconnect it. Pump over-Temperature Test − Connect the power cable. − Disconnect the potentiometer, set it to 5KΩ, and − On the controller front panel push the START and then reconnect it. -
Page 33: Accessories And Spare Parts
TECHNICAL INFORMATION ACCESSORIES AND SPARE PARTS DESCRIPTION PART NUMBER J1 input mating connector 969-9853 P7 mating plug 969-9854 969-9957 Mains cable (European plug, 3 m long) 969-9958 Mains cable (American plug, 120 V, 3 m long) OPTIONS DESCRIPTION PART NUMBER RS 232 kit 969-9851 P2 output mating connector... - Page 34 TECHNICAL INFORMATION 87-900-869-01 (D)
- Page 35 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 36 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 37 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.