Prober Control Script - Agilent Technologies B1500A Training Manual

Semiconductor device analyzer
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Prober Control Script

• Prober information file
prober_info.ini
• Start Procedure
Start_xxxx.exe
• Iteration Procedure
Iterator_xxxx.exe
• Final Procedure
Final_xxxx.exe
• Subsite Procedure
Subsite_xxxx.exe
xxxx: • cascade
• suss
• vector
Prober control script is sample program used for semi-automatic prober control. The Agilent
EasyEXPERT can call the script by using the Repeat Measurement Setup window.
See page 11-9 to call the script and perform repeat measurement.
See page 11-14 for the prober information file.
See page 11-13 for the start procedure.
See page 11-15 for the iteration procedure.
See page 11-16 for the final procedure.
See page 11-17 for the subsite procedure.
To use the prober control script, specify the start/iteration/final procedure in the Repeat Measurement
Setup dialog box (see page 11-9). And use the Subsite move test setup in your quick test to control
sub die move. The Subsite move setup uses the subsite procedure for moving wafer chuck to the
next subsite. See page 11-10 and 11-11.
Use prober control script in EasyEXPERT
Repeat Measurement Setup window
11-12
Advanced Definitions and Operations
Module 11

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