Agilent Technologies B1500A Training Manual page 112

Flash Memory – Endurance Test
Measure Vth Connection
Selector or ASU ch2
SMU3
PG3
Vth must be measured after writing or erasing. To perform the Vth measurement, all of the
selector/ASU channels must make the path to the SMU. Vth is measured at each decade, so a
mechanical relay will be used, not the solid state relay. The mechanical relay has low leakage
specifications to better match the capabilities of the SMUs.
Selector or ASU ch3
Drain
Mech
Substrate
Mech
Source
Gate
13-28
SMU4
Mech
Solid Mech
PG4
State
SMU1
Selector or ASU ch1
SMU2
Mech
Solid Mech
PG2
State
Module 13
SPGU Control and Applications