Calibration - Agilent Technologies B1500A Training Manual

Semiconductor device analyzer
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Module 12
Miscellaneous Operations
SMU Calibration

Calibration

The Calibration window is opened by clicking the Calibration button. The SMU calibration screen of
this window is used to perform the calibration of SMUs. The list area of this screen lists Name, Full
Range, and Status.
Name: Name of module. To select, check the left check box.
Full Range: For the high resolution SMU (HRSMU) connected to the atto sense/switch unit (ASU).
Full range calibration on or off.
Status: Calibration status. Pass or fail.
Notes: Error information when calibration failed.
To perform the self-calibration, specify the modules, open the measurement terminals of the
corresponding modules, and click the Start Calibration button.
Full Range Calibration:
For the HRSMU connected to the ASU. Enables or disables the full range calibration. If this box has
been unchecked, the B1500 does not use the 1 pA range.
Enable Auto Calibration:
Enables or disables the auto-calibration capability. If this box has been checked (function ON), and
the B1500 automatically starts calibration for all modules every 30 minutes if the output switches of
all modules are off for 30 minutes.
NOTE:
To perform calibration correctly, open the measurement terminals. If auto-calibration is enabled, do
not forget to open the measurement terminals or disconnect the device under test from the terminals
after measurement.
12-6

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