Class Exercise
Square Pulse Charge Pumping
1. Recall the Charge Pumping 4T 0.1V step test record.
2. Connect the DUT (MOS FET) as shown in the next
page.
3. Specify the module (SMU and PGU) connected to
DUT terminal properly.
4. Perform the test.
Note:
13-20
Module 13
SPGU Control and Applications