Speed
Clocked output
Ti0004
Ti0020
option (MHz)
5 µm
1 µm
50
10
10
40
10
10
25
10
10
20
10
10
12
10
9
10
10
8.10
08
10
6.48
06
10
4.50
04
10
3.37
01
4.2
0.84
Angular speed depends on ring diameter. Use the following equation to convert to rev/min.
V × 1000 × 60
Angular speed (rev/min) =
π D
Maximum speed (m/s)
Ti0040
Ti0100
Ti0200
Ti0400
Ti1000
0.5 µm
0.2 µm
0.1 µm
50 nm
20 nm
10
6.48
3.24
1.62
0.648
10
5.40
2.70
1.35
0.540
8.10
3.24
1.62
0.810
0.324
6.75
2.70
1.35
0.675
0.270
4.50
1.80
0.900
0.450
0.180
4.05
1.62
0.810
0.405
0.162
3.24
1.29
0.648
0.324
0.130
2.25
0.90
0.450
0.225
0.090
1.68
0.67
0.338
0.169
0.068
0.42
0.16
0.084
0.042
0.017
Where V = maximum linear speed (m/s) and D = external diameter of REXM/ REXT ring (mm)
Ti2000
Ti4000
Ti10KD
Ti20KD
10 nm
5 nm
2 nm
1 nm
0.324
0.162
0.0654
0.032
0.270
0.135
0.054
0.027
0.162
0.081
0.032
0.016
0.135
0.068
0.027
0.013
0.090
0.045
0.018
0.009
0.081
0.041
0.016
0.0081
0.065
0.032
0.013
0.0065
0.045
0.023
0.009
0.0045
0.034
0.017
0.0068
0.0034
0.008
0.004
0.0017
0.0008
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