Speed - Renishaw TONiC FS T3 1 Series Functional Safety Installation Manual And Safety Manual

Speed

Clocked output option
DOP0004
(MHz)
5 µm
50
10
40 10
25
10
20 10
12
10
10 10
08
10
06 10
04
10
01 4.2
Analogue output
(Ti0000 and DOP)
Original instructions
DOP0020 DOP0040 DOP0100
1 µm 0.5 µm 0.2 µm
10 10 6.48
10 10 5.40
10 8.10 3.24
10 6.75 2.70
9 4.50 1.80
8.10 4.05 1.62
6.48 3.24 1.29
4.50 2.25 0.90
3.37 1.68 0.67
0.84 0.42 0.16
Maximum speed (m/s)
DOP0200 DOP0400 DOP1000
0.1 µm 50 nm 20 nm
3.24 1.62 0.648
2.70 1.35 0.540
1.62 0.810 0.324
1.35 0.675 0.270
0.900 0.450 0.180
0.810 0.405 0.162
0.648 0.324 0.130
0.450 0.225 0.090
0.338 0.169 0.068
0.084 0.042 0.017
10 (−3dB)
DOP2000 DOP4000 DOP10KD
10 nm 5 nm 2 nm
0.324 0.162 0.0654
0.270 0.135 0.054
0.162 0.081 0.032
0.135 0.068 0.027
0.090 0.045 0.018
0.081 0.041 0.016
0.065 0.032 0.013
0.045 0.023 0.009
0.034 0.017 0.0068
0.008 0.004 0.0017
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DOP20KD
1 nm
0.032
0.027
0.016
0.013
0.009
0.0081
0.0065
0.0045
0.0034
0.0008
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