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2.3.4 Warm-up operation
Operation procedures
Analyzer unit
Gas extractor
Electronic gas cooler
Heating tube
NO
/NO converter
2
(option)
Reference gas
purifier
and
INZ-TN2ZSJ-E
Main Power
15A
SW1
SW2
SW3
SW4
LAMP
EXTRACTOR
PUMP1
PUMP2
RECEPT.
I
I
I
I
O
O
O
O
Extractor
GAS ANALYZER
About 4 hours
About 1 hour
10 min or more
1 hour or more
30 min or more
30 min or more
Heating Tube
AC100V
15A
MAX.2A
SW5
SW6
SW7
SW8
O
GAS
SAMPLING
2
FAN
MODULE
SENSOR
ANALYZER
I
I
I
I
O
O
O
O
Fig. 2-3
GAS ANALYZER
Note) While in warm-up, the concent-
-
-
27
SW9
MAINTENANCE
I
O
ration display may be as follows.
: Over the upper
limit of range
or
: Over the lower
limit of range
But it is not an error.
Fig. 2-4 Flow checker
Flow rate
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