Operation; Start-Up; Shut-Down - Edwards EXT200/200H LCMS Instruction Manual

Split flow compound turbomolecular pumps
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4

Operation

Do not operate the EXT Split Flow Pump unless it is connected to your vacuum system. If you do,
the pump rotor can cause injury. The pump rotor rotates at very high speeds and the rotating
blades might not be visible.
Do not move the pump whilst it is running. The gyroscopic forces generated by this movement can
cause excessive use of the back-up bearing and may result in catastrophic failure of the pump.
When power is restored following a power cut, the pump will re-start automatically. The pump
must remain connected to the vacuum system to prevent risk of injury.
After power to the pump has been switched off, either through emergency or as a requirement,
the rotor will continue to spin at very high speeds. Until the rotor has stopped it possesses
considerable mechanical energy.
4.1

Start-up

Use the procedure below to start up a basic, manually-controlled pumping system with a manual vent-valve and an
EXDC version controller. Refer to the EXDC Instruction Manual.
1. Ensure the manual vent-valve is closed (turn clockwise to close it).
2. Turn on the cooling-water supply (if water-cooling is used) and/or switch on the power to the air cooler.
3. Start the backing-pump.
4. When the vacuum system pressure is approximately 10 mbar or less, switch on the power supply to start the EXT
Split Flow Pump.
5. The pump will then accelerate to full operating speed. Once nominal operating speed is reached, the normal
speed LED on the EXDC Controller will illuminate.
Note:
Refer to the controller manual if using the EXC Controller.
4.2

Shut-down

Do not remove the EXDC Controller/EXC Controller cable from the pump until the pump is
completely at rest. To do so could expose personnel to hazardous voltage and potentially damage
the EXDC/EXC Controller.
Note:
In an emergency only, open the vent-valve quickly to decelerate the pump rotor in the shortest possible
time.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
WARNING
WARNING
WARNING
WARNING
WARNING
B756-01-880 Issue J
Page 21

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