Edwards EXT75iDX Manuals

Manuals and User Guides for Edwards EXT75iDX. We have 1 Edwards EXT75iDX manual available for free PDF download: Instruction Manual

Edwards EXT75iDX Instruction Manual (76 pages)

Compound turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
5
Introduction
9
Scope and Definitions
9
General Description
9
Drive Electronics
10
Operational Features
11
Power Limit Setting
11
Standby Speed
11
Timer
11
Analogue Output
12
Automatic Vent Options
12
Normal Speed Setting
12
Electronic Braking
13
Logic Interface
13
Parallel Control and Monitoring
13
Full Serial Control
14
Serial Control with Parallel Monitoring
14
Parallel Control with Occasional Serial Monitoring or Serial Setup
14
Podule Configuration (Serial Setup)
14
Technical Data
15
General
15
Pumping Media
15
EXT75DX Dimensions (MM)
19
EXT255DX Dimensions (MM)
20
Vent Gas Specification and Vent Control Data
21
Purge Gas Specification
22
Cooling Water
22
Materials Exposed to Gases Pumped
22
Electrical Data
23
Logic Interface Connector
23
Podule Connector Socket
24
Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed) 13 4 Podule Connector Plug
25
Indicator Leds
26
Operating and Storage Environment
26
Installation
27
Unpack and Inspect
27
Typical Installation
27
Connection to the Vacuum System
27
Typical Pumping System with a DX Pump
28
Inlet Screen (Supplied Fitted)
29
Correct Installation of the Inlet Screen (EXT75DX)
29
Correct Installation of the Inlet Screen (EXT255DX)
29
Mechanical Fixing
30
Inlet Connection and Orientation
30
Base Mounting
30
Backing Connection
31
Interstage Connection (IDX Variants Only)
31
Purge Gas Connection
31
Connect the Purge Gas
31
Recommended Purge Gas Flow
32
Electrical Installation
32
Introduction
32
Earth (Ground) Connections
32
Connect the Logic Interface to the TIC
32
Connect the Logic Interface to the Customer Control Equipment
32
Connect the Electrical Supply
33
Parallel Interface Mode
34
Logic Interface Connections - Parallel Mode
34
Serial Interface Mode
35
Connect the Serial Interface to the Customer Control Equipment
35
Logic Interface Connections - Serial Mode
35
Serial Enable
36
Serial Protocol
36
Message Structure
37
Conceptual Diagram for Multi-Drop Connection
37
Command Set
38
Simultaneous Parallel and Serial Operation
38
Multi-Drop Mode
41
Schematic Diagram of the Logic Interface Connections
41
Vent Options, Vent Valve Connection and Control
42
Manual Vent Valve
42
TAV5 or TAV6 Solenoid Vent Valve
42
Controlled Venting
42
Alternative Valve Connected to the Vacuum System
43
Cooling
44
Introduction
44
Forced Air Cooling
44
Water Cooling
44
Operation
47
Configuring the DX Pump Using Serial Commands
47
Power Limit Setting
47
Powering a Fan from the Podule
48
Controlled Venting Options
48
Standby Speed Setting
49
Normal Speed Setting
49
Timer Setting and Options
50
Analogue Signal Options
51
Electronic Braking Options
51
Factory Settings
52
Assigning a Multi-Drop Address
52
Configuring the DX Pump Using a TIC
53
Start-Up
53
Close the Vent Valve
53
Pre-Start Checks
54
Operation with Parallel Control and Monitoring
54
Start the Pump
54
Running at Standby Speed
54
Stop the Pump
54
Parallel Monitoring
55
Operation with Serial Control and Monitoring
55
Delayed Start
55
Start the Pump
55
Standby Speed
55
Stop the Pump
56
Temperature Readings
56
Link Parameter Readings
56
Measured Motor Speed
56
Simultaneous Parallel and Serial Operation
57
Operation with a TIC
57
Decelerating and Venting
57
Operation at Extreme Conditions
57
Operation with High Inlet Pressure
57
Operation at High Temperatures
58
Operation at Over-Speed
58
Electrical Supply Failure
58
Bakeout
59
Maintenance
61
Introduction
61
Bearing Maintenance
61
Rotor Life
61
Clean the External Surfaces of the Pump
61
Fault Finding
62
Flashing Error Codes
64
Decoding System Status Words
64
Useful Service Information
67
Storage and Disposal
69
Storage
69
Disposal
69
Service, Spares and Accessories
71
Introduction
71
Service
71
Returning a Pump for Service
71
Spares
71
ISX Inlet Screen
71
Inlet Strainer
72
Inlet Flange Seals
72
Accessories
72
Installation
72
ACX Air Cooler
72
WCX Water Cooler
72
BX Bakeout Band
73
TAV Vent Valve and Vent Port Adaptor
73
VRX Vent Restrictor
73
Vent Port Adaptor
73
PRX Purge Restrictor
74
Vibration Isolators
74
FL20K Foreline Trap
74
Podule Connector Plug
74
TIC Turbo and Instrument Controllers
74
TIC PC Program
75
Installation of Optional Accessories and Spares
75

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