Parameter
Recommended backing pump
*
Pumping speeds are without inlet screens
†
Above this pressure, rotational speed drops below nominal.
2.4
Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels,
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin
and carbon-fibre reinforced epoxy resin. Further to this, the machined from solid chamber, the top interface plate,
and the junction piece are surface treated with Alocrom 1000 on both internal and external surfaces. Alocrom 1000
is a chromate conversion coating with a thickness of < 1 micron. The total weight of the coating on the chamber is
approximately 20 mg.
© Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 1 - Technical data (continued)
EXT70/70/200H
See
Section 3.3.2
B756-50-880 Issue C
Notes
Page 5
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