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Ion focus lens
Entrance lens
Insulator
Repeller
Figure 15
Source parts to be cleaned
5975/5977 Series MSD Operation Manual
Standard or inert EI ion source parts to be cleaned
Drawout
cylinder
Extractor EI ion source parts to be cleaned
Entrance
Ion focus lens
lens
Drawout plate
Interface socket
Extractor lens
General Maintenance
Source body
Source body
4
107
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