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Figure 14
Disassembling the extractor EI ion source
Table 20
Item number
1
2
3
4
5
6
5975/5977 Series MSD Operation Manual
Parts list for the extractor EI ion source
Item description
Setscrews
Screws
Source body
Extractor lens
Extractor lens insulator
Filaments
General Maintenance
(Figure
17)
Part number
G3870-20446
G3870-20021
G3870-20440
G3870-20444
G3870-20445
G7005-60061
4
103
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