4
General Maintenance
Table 20
Item number
7
8
9
10
11
12
13
14
15
16
17
104
Parts list for the extractor EI ion source
Item description
Spring washer and flat washer
Lens insulator
Entrance lens
Ion focus lens
Repeller insulator
Repeller
Flat washer
Belleville spring washer
Repeller nut
Source heater block assembly
Insulator
(Figure
17) (continued)
Part number
3050-1301and 3050-0982
G3870-20530
G3170-20126
05971-20143
G3870-20133
G3870-60171
3050-0891
3050-1301
0535-0071
G3870-60177
G1099-20133
5975/5977 Series MSD Operation Manual