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4
General Maintenance
Figure 13
Disassembling the standard or inert EI ion source
Table 19
Parts list for the standard or inert EI ion source
Item number
Item description
1
Gold plated set screw
2
Gold plated screw
3
Interface socket
4
Source body
5
Drawout cylinder
6
Drawout plate
7
4-turn filament
100
(Figure
16)
Part number (SSL)
G1999-20022
G3870-20021
G1099-20136
G1099-20130
G1072-20008
05971-20134
G7005-60061
5975/5977 Series MSD Operation Manual
Part number (Inert)
G1999-20022
G3870-20021
G1099-20136
G2589-20043
G1072-20008
G2589-20100
G7005-60061
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