Vent Gas Specification And Vent Control Data - Edwards EXT70/70200 Instruction Manual

B756-50-880 Issue C
2.3

Vent gas specification and vent control data

Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times, vent the pump with dry, clean gases.
Vent gas
Maximum dew point at atmospheric pressure
Maximum size of particulate
Maximum concentration of oil
Time for rotational speed to reach 50%
Parameter
Mass (system)
Mass (Cartridge pump)
Outlet flange
Main inlet pumping speed (TOF)
*
N2
*
He
*
Ar
*
H2
Front-side inlet pumping speed (Transfer chamber)
*
N2
*
He
*
Ar
*
H
2
Back-side Inlet pumping speed (Tunnel optics)
*
N2
*
He
*
Ar
*
H
2
Maximum continuous inlet pressure
†
Air cooling at 35°C
Main inlet
Transfer
Tunnel optics
Nominal rotational speed
Starting time to 90% speed
EXDC160
Noise level (at 1 metre)
Recommended controller
EXDC160 maximum VA input
Quiescent power
Page 4
Dry air, nitrogen, argon or other inert gases
-22 °C
1 µm
0.1 parts per million
>15 sec
Table 1 - Technical data
EXT70/70/200H
>23 kg
9 kg
DN25NW
-1
170 ls
-1
187 ls
-1
164 ls
-1
169 ls
-1
110 ls
-1
153 ls
-1
100 ls
-1
133 ls
-1
177 ls
-1
167 ls
-1
167 ls
-1
103 ls
-2
1.6 x 10 mbar (1.6 Pa)
-2
3.36 x 10 mbar (3.36 Pa)
-2
3.62 x 10 mbar (3.621 Pa)
60000 r min
115 sec
< 50 dB(A)
EXDC160 24 V
250 VA
25 W
Edwards and the Edwards logo are trademarks of Edwards Limited.
Notes
Eyebolt positions are supplied
for lifting and handling
Air cooling is beneficial to the
EXDC160 controller
-1
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