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Checking the Air Pressure of the Process Pump
Tools
Before checking the air pressure of process pump, set the "1 trip" cleaning mode
to damp, with the cleaning vacuum off.
After checking the air pressure, return the cleaning data to the original settings.
1B4C-EEn-Ma-001
OFF (
1B4C-405P
To the next page
1E4C-E-MMA01-A07-00
SERVO
) ON (
)
Check Every 560 Hours (Once a Month)
Required time
NOTICE
UNLOCK
1.
Press
• The "Cleaning" screen appears.
• The X-Y table moves to the operator's side.
2.
Turn off the servo switch.
3.
Open the front safety cover.
4.
Open the center safety cover, and pull
out the cleaning unit.
3 to 5 minutes
+ Mask cleaning .
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