Explanation Of Terms; Technical Specifications - ferrotec genius Mounting Instructions

Evaporation controller
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Mounting instruction Genius
2.3

Explanation of terms

C
/HVP
ARRERA
G
ENIUS
FPS
2.4

Technical specifications

2.4.1
Product specific data
D A N G E R !
electron beam evaporator in compliance with its intended use are
procured and used by the operator of the electron beam evaporator.
Proper handling of these materials/media and the related dangers are
the sole responsibility of the operator. The operator must supply his
operating personnel with information and instructions on dangers and disposal. The
safety data sheets of the material/media manufacturers must be observed
Control
Memory:
Firmware-Version:
Modes of operation:
Cooling:
Operation:
Control panel:
Battery:
2.4.2
Dimensions and weight
Width
Height
Depth
Total weight
2.4.3
Electrical specifications
Electrical specifications,
Power consumption
Mains power supply
Mains frequency
Electrical specifications, Magnet power supply
Output voltage
Output current
X-deflection
Y-deflection
Version 2.0.6
device designation for the high voltage power supply (High
Voltage Power Supply)
device designation for the evaporation controller
device designation for the filament power supply (Filament Power
Supply)
The materials/media needed for operation of the
Micro controller Siemens C167, 16 Bit
256 kB Flash-EPROM
see page 29
• Manual: All settings are made with the LCD-remote control.
• Auto: The emission current is set by a rate controller via X111.
• RS232: The evaporation controller is remote-controlled via the
RS 232 interface (e.g. by a PC)
Forced air cooling by internal fan
User-friendly, menu-driven operation
Remote control with CFL-illuminated LCD-display (64x256 pixel),
emission controlled, illuminated control buttons, 2 digital joysticks
Lithium cell, expected lifetime 10 years
483 mm (equals 19")
132,5 mm (equals 3 HE)
200 mm (+100 mm minimum distance to backdoor of the
cabinet )
7 Kg
- evaporation controller
G
ENIUS
0,6 kVA
85 ... 264 VAC
50 ... 60 Hz
24 V
± 3 A
± 3 A
± 3 A
9/78
G
ENIUS
Ferrotec GmbH

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