Intended Use - ferrotec genius Mounting Instructions

Mounting instruction Genius
1. High voltage power supply HVP
2. Evaporation controller
3. Filament power supply (FPS)
4. Electron beam evaporator
5. Vacuum chamber
6. Grounding rod
7. Deposition controller including sensor
2.2

Intended Use

The evaporation controller
tron beam evaporator installed in a vacuum chamber.
The group of devices consists of:
1. High voltage power supply (HVP)
2. Evaporation controller
3. Filament power supply (FPS)
4. Grounding rod
Use of the evaporation controller
is not allowed. The evaporation controller
group of devices. Use of the evaporation controller for any other purpose requires the
approval of the manufacturer. This Mounting instruction deals only with the design and
operation of the evaporation controller
operation of the other devices in the group. These devices were developed, designed and
build solely for commercial/industrial use. Proper use in accordance with its designated use
includes compliance with the manufacturer's operating maintenance and repair instruction.
W A R N I N G !
secured by the unit controller in such a way that it is possible to ensure
that both the rotary crucible movement and the high-voltage power
supply are stopped. To do this, there are the relevant external connection
options at the high-voltage supply and at
setting up the entire unit is required to integrate this safety function in accordance
with the performance level determined in the functional safety.
D A N G E R !
the purpose described above. Any other use or modification of the
evaporation controller
manufacturer is deemed improper. The manufacturer accepts no liability
for resultant damage. The risk is borne solely by the operator.
N O T I C E
manufacturer's declaration. The evaporation controller
to be operated in Industrial environment.
Version 2.0.6
G including hand remote control
ENIUS
G is part of a group of devices for the operation of an elec­
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(G ) including hand remote control
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other that in combination with this group of devices
G
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G
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. Please see the relevant operation manuals for
G
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Access to the electron beam evaporator is to be
G
The evaporation controller
without the written consent of the
G
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on application of the EMC Directive 2004/108/EG in the
8/78
is intended solely for the control of this
controller available. The person
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G is intended solely for
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G is only allowed
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Ferrotec GmbH