Genius Pro, Features And Operation - ferrotec genius Mounting Instructions

Mounting instruction Genius
10.6
G
ENIUS
G
The evaporation controller features extended sweep functionality beyond the
P
ENIUS
RO
given to get a uniform depletion for different kinds of materials.
10.6.1 Sweep – Sweep mode settings
10.6.1.1
If the mode sweep off is activated then no dynamic sweep is applied to the beam. This set­
ting is equivalent with setting the value for »amplitude« (incl. »dynamic amplitude«*) to zero.
Only a static deflection of the beam with the corresponding position offset according to the
»position« parameter will occur.
10.6.1.2
der. The individual amplitude setting define the expansion of the beam path for both direc­
tions.
N O T I C E !
isn´t in a fixed ratio like 1:3 to avoid standing waves which can result
in beam tunneling
10.6.1.3
Version 2.0.6
, Features and Operation
P
R O
Sweep off
Lissajous
The Lissajous mode is the standard and conventional mode to
deflect a beam dynamically. The dynamic sweep is generated by
superimposing the static beam with a dynamic deflection in both
x- and y-direction. Both channels can be supplied with frequencies
from 0..100 Hz. There's no fixed phase relation between the chan­
nels.
While one deflection coil forces the beam to go up and down the
other coil makes the beam to cycle between the right and left bor­
Make sure that the frequency for x- and y- deflection
Waveform–Editor
standard version of the
standard
by exchanging the remote control
into a version that grants access
to the additional functions
In the following all additional fea­
tures are described and examples
The submenu Set-Data-SWEEP is
used to switch between the follow­
ing sweep modes:
For all sweep modes a further cir­
cular path can be superimposed
with the Dynamic Defocus
»dynamic defocus« function.
The G
channels 4 predefined waveforms
(Sine, Triangle, Square, rectified
Sine) and user defined wave­
forms which are generated out of
32 points for sequential repeti­
tion. The functions can be selec­
71/78
G
ENIUS
G
can be upgraded
ENIUS
supports on both
ENIUS
Ferrotec GmbH
. A