Functional Description, Variants; Functional Description - ferrotec genius Mounting Instructions

Mounting instruction Genius
view of evaporation controller Page 22) and the connection plan
ing diagram of the evaporation controller Genius Page 22).
D A N G E R !
high voltage power supply
evaporation controller
must then be connected directly to the safety switches of the system,
while only the status of the interlocks is connected via the contacts on
Check the connection cable for the remote control. The connection is located on the back of
the evaporation controller. Further information on the connections is to be found in chapter
3.3, Interfaces page 14.
5.5.5 Power supply cable
The power supply cable connects the evaporation controller to the mains power supply.
Plug the power supply cable into the mains connection on the evaporation controller.
N O T I C E !
sockets they are not provided for.
6

Functional description, Variants

6.1

Functional description

The functional elements on the front and rear side of the
5.5.2.2 on page 22.
6.1.1 Function
The evaporation controller is responsible for the control of the high voltage power supply,
electron beam evaporator and filament power supply. The high voltage and emission cur­
rent are set with the evaporation controller. The evaporation controller also monitors the
evaporation processes in the vacuum system. Data interchange between the evaporation
controller and the individual devices is effected along the control cables. All the operating
elements are arranged on the remote control of the evaporation controller. Faults are indic­
ated in the LCD display of the remote control together with the fault number and a descrip­
tion of the fault.
The evaporation controller is designed for mounting in a 19" rack cubicle. All the settings for
manual operation are made with the remote control. The remote control can be fastened to
the evaporation controller with the hook on the front panel. It can be taken off the evapora­
tion controller when needed (see Fig. 6). It is connected to the evaporation controller by a
connection cable.
N O T I C E !
evaporation controller, please see the operating manuals for the high
voltage power supply HVP and filament power supply FPS in combination with
the electron beam evaporator and vacuum system.
Version 2.0.6
If the evaporation controller is being connected to the
C
ARRERA
G is to be used. The interlock connection
ENIUS
The plugs are not confusion-safe, plugs may fit into
For a complete overview of the mode of operation of the
25/78
C
ARRERA
the connection plan for the
are described in chapter
G
ENIUS
-System (Fig. 4: Wir­
X305
X110.
Ferrotec GmbH