Fault, Cause, Remedy - ferrotec genius Mounting Instructions

Mounting instruction Genius
10.6.1.4.5.
The Dwell-Matrix mode is special mode that supports different beam dwell time patterns
which determine the energy distribution of the electron beam on the pocket surface und
thus the depletion of the evaporation material. Every desired material can be treated with
its own evaporation characteristics to achieve uniform material depletion and optimum res­
ults for the deposition.
value between 0 –200% by using the right joystick up and down (the cell changes its intens­
ity from white to black). Pushing to the right or left copies the value of the corresponding
neighboring cell. A sophisticated algorithm in the
beam according to the programmed dwell matrix pattern without the need for additional
beam path programming. Basically the beam dwells twice as long within one cells area
compared to a different cell with half of the value. The frequencies defined in the Set Data-
Frequency menu determine the relative speed of the beam in both directions.
Fig. 24: Disc pattern
matrix at 15 Hz
11

Fault, Cause, Remedy

D A N G E R !
causes and correction in this chapter are described in such a way
that they can be understood by skilled person (see definition on chapter
3.4 „Safety precautions (by the operator)") with training in electrical
engineering/electronics and mechanical engineering/maintenance . These
technicians must be equipped with the proper tools and test materials . The shutdown
procedure (see chapter. 4.4 page 18) must be carried out before all maintenance and
repair work. If the measures described below do not prove successful, please contact
Ferrotec GmbH.
Version 2.0.6
Dwell Matrix
Fig. 26: Disc pattern
matrix at 40 Hz
The situations and information on faults, their
Having selected the Matrix mode
the waveform editor menu will
disappear and a new submenu
»Dwell-Matrix« is displayed
instead.
G
The
8 predefined dwell matrix pat­
terns which can be modified into
new user defined patterns. Move
the left joystick to select one of
the quadrants and modify its
G
P software deflects the electron
ENIUS
RO
Fig. 27: Circle shapped
matrix
75/78
P software includes
ENIUS
RO
Fig. 25: Square shapped
matrix
Ferrotec GmbH