Index - ferrotec genius Mounting Instructions

Evaporation controller
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Mounting instruction Genius
14

Index

A
Amplitude............................................31, 32, 33, 38, 39, 40, 41, 46, 52, 71, 72, 73, 74
C
Carrera........................................................................................................ 9, 17, 25, 50
Change limits............................................................................................................... 49
Cleaning...............................................................................4, 12, 15, 16, 17, 18, 50, 76
Coding.........................................................................14, 38, 47, 51, 56, 62, 63, 64, 70
Constant.............................................................................................. 16, 28, 32, 49, 59
CPU Card..................................................................................................................... 67
D
Deflection.................................................................................................................... 52
Deflection coil........................................................................................................ 12, 71
Defocus...........................................................................................................................
Defocus.................................................................................................................................. 52, 71, 73, 74
Defocus amplitude............................................................................................................................. 73, 74
Defocus frequency................................................................................................................................... 73
Dismantling............................................................................................................. 5, 76
E
Emission.............9, 24, 25, 26, 28, 30, 31, 32, 37, 41, 42, 43, 45, 46, 49, 51, 58, 59, 61
F
Fault............................................................................................................ 2, 12, 45, 49
Filament...................................................8, 9, 18, 21, 25, 26, 31, 45, 49, 50, 58, 59, 74
Filament power supply...........................................................8, 9, 18, 21, 25, 26, 49, 58
G
GRC Card.......................................................................................14, 23, 24, 26, 52, 68
Grounding........................................................................................................................
Grounding................................................................................................................................ 8, 17, 24, 30
Grounding cable....................................................................................................................................... 24
Grounding rod................................................................................................................................ 8, 17, 30
I
I/O Card....................................................................................................................... 47
Install.............................................................................4, 13, 15, 16, 17, 19, 20, 21, 24
J
Joystick.............................................9, 28, 32, 33, 37, 38, 39, 40, 41, 43, 44, 47, 72, 75
L
Limits...................................................17, 27, 31, 32, 33, 38, 39, 40, 41, 42, 45, 49, 73
Lissajous.......................................................................................................... 39, 71, 72
Logic................................................................14, 47, 58, 59, 60, 61, 64, 65, 66, 67, 68
M
Magnet......................................................................................9, 19, 47, 49, 50, 59, 60
Magnet current..............................27, 28, 31, 32, 33, 38, 39, 40, 42, 47, 49, 52, 58, 59
Master........................................................................................... 12, 13, 23, 49, 57, 76
Menu................................................................33, 38, 39, 40, 41, 42, 43, 44, 45, 46, 72
O
Operating....2, 4, 8, 9, 12, 15, 16, 17, 18, 21, 25, 26, 27, 28, 30, 32, 33, 36, 37, 38, 51,
52, 58, 60, 66, 71
Options................................................................................8, 26, 33, 38, 39, 41, 45, 52
Optocoupler................................................................................................................. 51
P
Pocket................................31, 45, 47, 53, 56, 57, 58, 61, 62, 63, 64, 65, 66, 67, 68, 69
Process parameter..........................................................................................................
FILAMENT CURRENT....................................................................................................................... 45, 49
Version 2.0.6
77/78
Ferrotec GmbH

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