Variants, Optional Extras; Operation; Commissioning - ferrotec genius Mounting Instructions

Mounting instruction Genius
6.2

Variants, Optional extras

6.2.1 Variants
The evaporation controller is available in the variants
differ in their internal control programs (firmware). The
menu functions.
G
ENIUS
G P
ENIUS RO
6.2.2 Options
The evaporation controller
6.2.2.1 I/O-Interface Card Gun Rotation Card– GRC Card
6.2.2.1.1.
The gun rotation card GRC serves with the interface
pocket evaporators.
6.2.2.1.2.
The GRC card has with the
outputs for connection to rate controllers or other control components.
6.2.2.1.3.
The safety interlock for the Gun Rotation Card is supplied for a safe integration into the
overall control system of the rotation of the crucible when the vacuum chamber is open.
6.2.2.2 Filament Switch Card - FSC
6.2.2.2.1.
The filament switch card FSC serves to control two evaporators in sequential operation of a
evaporation controller. One evaporator is controlled by the emission control, while the other
can be operated in rest mode. Two FSC cards can be combined for alternating operation of
three evaporators.
7

Operation

W A R N I N G !
by trained personnel.
7.1

Commissioning

The commissioning of the evaporation controller is together with the commissioning of the
overall deposition system. The components of the overall deposition system:
Evaporation controller
•
High voltage power supply (HVP)
•
Filament power supply(FPS)
•
Vacuum system
•
Electron beam evaporator
•
must be completely set up and connected before commissioning begins. Carry out the fol­
lowing inspections as part of commissioning:
Version 2.0.6
Standard version of the evaporation controller.
Evaporation controller with extended sweep functionality.
G can come with the following options.
ENIUS
Gun Rotation Card
Digital I/O ports (I/Os)
X119 Interface additional freely programmable digital in- and
Safety Interlock for the rotation of the crucible
Evaporator switchover
The evaporation controller may only be operated
(G )
ENIUS
and
G
ENIUS
G P
ENIUS RO
X118 to control the drive of multi­
26/78
. The variants only
G P
ENIUS RO
-Version has additional
Ferrotec GmbH