Integrated Safety Systems - ferrotec genius Mounting Instructions

Mounting instruction Genius
3.1.3 Warranty from the manufacturer
3.1.3.1 Conditions of the warranty
FerroTec products are produced and inspected in accordance with our quality management
system. Warranty must be claimed immediately after the notice of the failure including the
serial number of the deposition controller. The manufacturer guarantees warranty of the
product of 12 months to be free on defects caused by material failure or failures caused by
the manufacturing process. If a fault occurs during this time period the manufacturer guar­
antees free of charge repair in regards of parts and labor time.
3.1.3.2 Warranty exclusions
Damages caused by improper or not intended use (see Chapter 2.2 page 8) or unauthor­
ized alterations into the
3.2

Integrated safety systems

N O T I C E !
the operation in combination with other devices to operate an electron
beam evaporator. The safety systems are designed accordingly. Use of the
evaporation controller
the manufacturer. The operator is responsible for the safe operation of the
evaporation controller. It is in his responsibility to find out what legal rules and
regulations must be complied with and to apply them.
The evaporation controller is equipped with
a mains fuse
•
confusion-safe
•
The evaporation controller
Interlock status indication
The vacuum chamber door, the vacuum of the vacuum chamber, the water flow of the cool­
ing water into the electron beam evaporator, the deflection current of the magnetic deflec­
tion coils and one external interlock can be monitored (external interlock circuit).
D A N G E R !
groups of devices, which are operated with deadly high voltage. It is
strictly forbidden to render any of the safety devices inoperative. Violation
can result in personal injury and damage to the equipment.
The integrated safety systems must be checked at regular intervals.
3.2.1.1.1.
Test interval: yearly functional test
The evaporation controller has to be integrated in a master emergency stop system that
immediately puts the evaporation controller and the high voltage power supply into a safe
operating state when actuated and isolates this from the mains power.
D A N G E R !
maintenance and repair work, it must be locked with a padlock to
prevent unauthorized switching on.
Version 2.0.6
are excluded from this warranty.
G
ENIUS
The evaporation controller
for any other purpose requires the approval of
G
ENIUS
to protect the device.
connectors
is connected by using a IEC male socket.
G
ENIUS
of the operation modes (HV-off menu):
The evaporation controller controls the individual
Mains isolator (mains switch)
When the main switch is switched off for cleaning,
G is intended soley for
ENIUS
12/78 Ferrotec GmbH