Mounting instruction Genius
5.5
Assembly, Installation, Initial start up.
Assembly and initial start-up must be carried out by skilled personnel from Ferrotec GmbH
or the customer's skilled personnel who have been especially trained for this work. Consult
the Mounting instruction and technical reference material supplied for assembly and install
ation of the Evaporation controller
D A N G E R !
controller
personnel.
5.5.1
Assembly
The Evaporation controller
•
The device is equipped with 2 handles on the front for holding purposes.
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Make sure the rack is set up so that the operation of the evaporation controller by
•
remote control of the evaporation controller is possible with simultaneous visual con
tact with the evaporator in the vacuum chamber.
Free access to the remote control must be guaranteed.
•
5.5.2
Electrical connection
Connection requirements
Only use the connection cables delivered with the evaporation controller.
•
The standard cable connection between
•
and HVP 2,5 m.
G
ENIUS
The remote control is connected to the evaporation controller with a 2,5 m long
•
cable.
Make sure the protective ground is connected as prescribed. The cable is 5 m long; it
•
might have to be shortened (do not lay in loops).
Make sure there is a protective fault current circuit.
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Integrate the evaporation controller into the emergency-stop system of the overall
•
system.
D A N G E R !
evaporation controller to the mains voltage is made the complete
cabling of the vacuum system, the electron beam evaporator, the filament
power supply and the Genius control unit must be installed.
5.5.2.1 Wiring diagram
In Fig. 5-2 a typical standard wiring is shown for a vacuum system including a a electron
beam evaporator.
N O T I C E !
Appendix is valid in these case of these designs.
The wiring diagram contains all connections. The plugs are marked with X...; you will find
this marking on the devices as well. The marking of the cables is 95 .. .. At the same time
these are part numbers for ordering spare parts.
Version 2.0.6
G
.
ENIUS
The electrical installation of the Evaporation
must be carried out only by trained, skilled
G
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G
is designed for a mounting rack (19"-Rack).
ENIUS
Please, note that before the connection of the
On special versions the wiring diagram attached in the
21/78
G
and FPS ist 5 m long, that between
ENIUS
Ferrotec GmbH