6.4
ZA8F Flow Setting Unit, ZR40H Automatic
Calibration Unit
Flowmeter for
reference gas
Figure 6.8
Flowmeter for
Reference gas
Reference gas flow
setting valve
Calibration gas flow
setting valve
Figure 6.9
Reference gas flow
setting valve
Flowmeter for
calibration gas
ZA8F Flow Setting Unit
Flowmeter for
Calibration gas
REF.OUT
ZR40H Automatic Calibration Unit
<6. Components>
Span gas flow
setting valve
Zero gas flow
setting valve
Terminal Box
Made in Japan
CAL.OUT
SPAN IN
ZERO IN
F6.5.ai
F6-4E.ai
IM 11M12A01-02E
16th Edition : Mar. 19, 2020-00
6-8