NOTE 1: Filters
[F]
[B]
The locations of the filters which should be cleaned or replaced at PM are
shown above.
1. Dust filters to be replaced at 40 K PM:
•
Optics cooling fan filter [A]
•
Development filter [B]
•
Development exhaust fan filters [C]
•
Charge inlet fan filter [D]
•
Inner cooling fan filter [E]
2. Ozone filters to be replaced at 40 K PM:
•
Development ozone filter [F]
3. Dust filter to be cleaned at 40 K PM:
•
Development duct lower filter [G]
A172/A199
[A]
[C]
[G]
4-74
[D]
[E]
SM