Technical Data And Dimensions; General; Technical Data - Pfeiffer Vacuum HIPACE 300 Operating Instructions Manual

14 Technical data and dimensions
14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
● Specifications according to PNEUROP committee PN5
● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
● ISO 21360 2012: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
Tbl. 15:
mbar l/s
Pa m
sccm
Torr l/s
atm cm
Tbl. 16:
14.2 Technical data
Type designation extended
Connection flange (in)
Connection flange (out)
Final pressure
Compression ratio for Ar
Compression ratio for H
Compression ratio for He

Technical data

Maximum values refer exclusively to the input as a single load.
torque"
ance - Part 1: General description"
ance - Part 4: Turbomolecular vacuum pumps"
mbar
1
1000
0.01
1
10
1.33
Conversion table: Pressure units
mbar l/s
1
10
3 /s
-2
1.69 · 10
1.33
3 /s 1.01
Conversion table: Units for gas throughput
2
bar Pa
1 · 10 -3 100
1
1 · 10 5
1
1 · 10 -5
100
1 · 10 -3
0.01 1000
133.32
1.33 · 10 -3
2
1 Pa = 1 N/m
sccm
Pa m 3 /s
0.1 59.2
1 592
-3 1
1.69 · 10
0.133 78.9
0.101 59.8
HiPace® 300 with
TC 110
DN 100 ISO-K
DN 16 ISO-KF/G ¼"
< 1 · 10 -7 hPa
> 1 · 10 11
9 · 10 5
8
> 1 · 10

Technical data and dimensions

3
/h)
hPa kPa Torr | mm Hg
1 0.1 0.75
1000 100 750
0.01
1 · 10 -3 7.5 · 10
1 0.1 0.75
10 1 7.5
1.33 0.133 1
Torr l/s
0.75
7.5
-2
1.27 · 10
1
0.76
HiPace® 300 with HiPace® 300 with
TC 110 TC 110
DN 100 CF-F DN 100 ISO-F
DN 16 ISO-KF/ DN 16 ISO-KF/G ¼"
G ¼"
< 5 · 10 -10 hPa < 1 · 10
> 1 · 10 11 > 1 · 10
9 · 10 5 9 · 10
8
> 1 · 10 > 1 · 10
-3
atm cm 3 /s
0.987
9.87
-2
1.67 · 10
1.32
1
-7 hPa
11
5
8
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