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14 Technical data and dimensions
14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
● Specifications according to PNEUROP committee PN5
● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
● ISO 21360 2012: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
Tbl. 15:
mbar l/s
Pa m
sccm
Torr l/s
atm cm
Tbl. 16:
14.2 Technical Data
Type designation
Connection flange (in)
Connection flange (out)
Final pressure
Pumping speed for Ar
Pumping speed for H
Pumping speed for He
Pumping speed for N
Gas throughput at final rotation speed for Ar
Technical data
Maximum values refer exclusively to the input as a single load.
torque"
ance - Part 1: General description"
ance - Part 4: Turbomolecular vacuum pumps"
mbar
1
1000
0.01
1
10
1.33
Conversion table: Pressure units
mbar l/s
1
10
3
/s
-2
1.69 · 10
1.33
3
/s
1.01
Conversion table: Units for gas throughput
2
2
bar
Pa
1 · 10
-3
100
1
1 · 10
5
1
1 · 10
-5
100
1 · 10
-3
0.01
1000
133.32
1.33 · 10
-3
2
1 Pa = 1 N/m
sccm
Pa m
3
/s
0.1
59.2
1
592
-3
1
1.69 · 10
0.133
78.9
0.101
59.8
Technical data and dimensions
3
/h)
hPa
kPa
Torr | mm Hg
1
0.1
0.75
1000
100
750
0.01
1 · 10
-3
7.5 · 10
1
0.1
0.75
10
1
7.5
1.33
0.133
1
Torr l/s
atm cm
0.75
0.987
7.5
9.87
-2
1.27 · 10
1.67 · 10
1
1.32
0.76
1
HiPace® 80 Mini
DN 63 ISO–K
G ¼"
-7
< 1 · 10
hPa
66 l/s
48 l/s
58 l/s
67 l/s
0.54 hPa·l/s
-3
3
/s
-2
49/54
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