3 Product description
3.1 Function
The turbopump forms a compact unit with the electronic drive unit. Pfeiffer Vacuum power supply packs
provide the voltage supply.
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14
Fig. 2:
1 Protective cover for the high vacuum connection
2 Venting screw
3 Ground terminal
4 Pump housing, stainless steel
5 Turbo rotor
6 High vacuum connection, DN 100 CF-F
7 Fore-vacuum connection, DN 16 ISO-KF
8 Multifunction connection "X3"
3.1.1 Cooling
● Convection cooling
● Air cooling (optional)
● Water cooling (optional)
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.1.2 Rotor bearing
Hybrid-bearing turbopump
● High vacuum side: wear-free permanent magnetic bearing
● Fore-vacuum side: ball bearing with ceramic balls
Permanent lubrication of the rotor bearing on the fore-vacuum side is ensured by an operating fluid res-
ervoir.
3.1.3 Drive
● TC 110 electronic drive unit
1
13
12
11
HiPace 300 design
2
3
8
9
10
9
LED operating mode display
10
Sealing gas connection
11
Cooling water block panel
12
Protective cover for the fore-vacuum con-
nection
13
Pump base
14
Electronic drive unit TC 110
15
Pump housing, aluminum
Product description
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