Pfeiffer Vacuum HIPACE 700 Operating Instructions Manual
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Pfeiffer Vacuum HIPACE 700 Operating Instructions Manual

Turbopump
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OPERATING INSTRUCTIONS
EN
Translation of the original instructions
HIPACE 700
Turbopump

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Summary of Contents for Pfeiffer Vacuum HIPACE 700

  • Page 1 OPERATING INSTRUCTIONS Translation of the original instructions HIPACE 700 Turbopump...

  • Page 2: Table Of Contents

    12.1 HiPace 700, 48 V DC ........34 12.2 Differences at HiPace 700, 24 V DC......35 Technical data and dimensions .

  • Page 3: About This Manual

    About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development.
  • Page 4 About this manual Pictographs Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document...

  • Page 5: Safety

    Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

  • Page 6: Protective Equipment

    Safety ● Do not loosen any plug connection during operations. ● Wait for the rotor to reach standstill before peforming work on the high vacuum flange. ● Keep leads and cables well away from hot surfaces (> 70 °C). ● Never fill or operate turbopump with cleaning agent. ●...

  • Page 7: Improper Use

    Safety ● The vacuum pump may only be used to generate a vacuum. ● Only operate the turbopump with an approved backing pump. Improper use Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially: ●...

  • Page 8: Transport And Storage

    Transport and storage Transport and storage Transport  Reuse the transport container of the vacuum pump. – Transport or ship vacuum pumps in the original packing preferably.  Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection.

  • Page 9: Product Description

    Made in Germany Fig. 1: Example for a rating plate ● HiPace 700 with TC 400 and 24 V DC ± 5 % Variants ● HiPace 700 with TC 400 and 48 V DC ± 5 % ● Turbopump with electronic drive unit Scope of delivery ●...

  • Page 10: Function

    Product description Function The turbopump HiPace 700 forms a complete unit together with the electronic drive unit TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS or DCU). remote Fig. 2: View of HiPace 700 with TC 400...

  • Page 11: Range Of Application

    Product description Range of application The pump HiPace 700 must be installed and operated under the following ambient con- ditions: Installation location weather protected (indoors) Protection category IP 54 Protection class Temperature +5 °C to +35 °C with air cooling +5 °C to +40 °C with water cooling...

  • Page 12: Installation

    120 °C. ● The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum. ● It is not allowed to operate the device in systems where impact-like stresses and vi- brations or periodically forces occur.
  • Page 13 Example: How to secure against shifting and tipping by external tremors = Safety connection, implementation each by the customer Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vac- Use of a splinter uum flange protect the turbopump against foreign bodies coming from the chamber.
  • Page 14  The combination of different flange types is impermissible in any case.  Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis- sible fastening. NOTICE...
  • Page 15 Installation ● the valid mounting kit of the Pfeiffer Vacuum accessories programme ● mounting materials including protection screen or splinter shield are optionally avail- able Hexagon screw and threaded hole  Mind that the sealing surfaces are not damaged.  Connect the flanges according to the drawing and with the component parts of the mounting kit.
  • Page 16 Installation Hexagon screw and through hole  If used: Insert protective screen or splinter shield with the clamping lugs downward into the high vacuum flange of the turbopump.  Place the seal exactly in the hollow.  Connect the flange using 20 hex screws (M8) with washers and nuts and tighten cir- cularly with a torque of 22 ±2 Nm.

  • Page 17: Connecting The Fore-Vacuum Side

    Installation Connecting the fore-vacuum side Recommendation: As backing pump, use a suitable vacuum pump from the Pfeiffer Vacuum programme. WARNING Damage to health due to poisonous gases Process gases can damage health and contaminate the environment.  Safely lead away the gas emission from the backing pump! ...

  • Page 18: Connections To The Turbopump

    Detailed description for function, configuration and operation with the respective connec- tion panel are given in the specific operating instructions for the electronic drive unit. Pfeiffer Vacuum recommends to connect an appropriate earthing wire to derive applica- Earthing tive interferences.
  • Page 19  To connect two units to one accessory connection, use the appropriate Y-Connector from the Pfeiffer Vacuum range of accessories.  Connect the adapter to the appropriate red-coded connection on the TC 400.  Settings can be made via the interfaces of the TC 400 (remote, RS-485, Profibus or...
  • Page 20  Plug in and fix the accessory’s control lead to the corresponding accessory connection port on the electronic drive unit.  Default for air cooling is "accessory A1". The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or Venting valve power failure.
  • Page 21 ● When operating the pump with more than 50 % of the maximum gas throughput, seal- ing gas must be used to ensure rotor cooling. ● The sealing gas flow rate amounts 12-15 sccm for the HiPace 700. Sealing gas supply with control valve Fig.
  • Page 22 Installation CAUTION Risk of burns High temperatures arise when the turbopump or vacuum chamber are baked out. As a result, there is a danger of burns from touching hot parts, even after the casing heating is switched off!  Thermally insulate heating jacket, pump housing and vacuum chamber, if possible during installation.
  • Page 23 Installation The turbopumps HiPace 700 with TC 400 have water cooling as standard equipment. Water cooling ● In case of increased backing pressure (> 0.1 hPa) and/or operation with high gas throughputs, either air or water cooling may be used.

  • Page 24: Operation

    Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de- struction of the pump.  Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80). Operation modes The following operation modes are available: ●...

  • Page 25: Monitoring Of The Operation Conditions

    "remote" connection  Consider the following manuals for the operation via remote control: ● Operating instructions "Electronic drive unit TC 400"  Consider the following manuals for the operation via Pfeiffer Vacuum display and con- Operation with DCU trol units: or HPU ●...

  • Page 26: Switching Off And Venting

    – The valve cross section for the venting rate of 15 hPa/s must be adapted to the size of the vacuum chamber. – For small vacuum chambers, use the Pfeiffer Vacuum venting valve.  Then vent with an additional venting valve of any desired size.

  • Page 27: Maintenance / Replacement

     Decontaminate affected parts before carrying out maintenance work. NOTICE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or op- erating malfunctions due to improperly performed maintenance. The liability and war- ranty entitlement expires.
  • Page 28 Maintenance / replacement Fig. 13: Assembly / Disassembly of the operating fluid reservoir End cover Poroplast rod Allen head screw Operating fluid reservoir Splash nut O-ring  Screw out the Allen head screws (3x) from the end cover at the bottom of the tur- bopump.

  • Page 29: Replacing The Electronic Drive Unit

    Maintenance / replacement Replacing the electronic drive unit NOTICE Damages to the pump and drive Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.

  • Page 30: Decommissioning

     Check turbopump for contamination and moisture.  Clean the turbopump externally with a lint-free cloth and little industrial alcohol.  If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.  If necessary, have the bearings replaced. Take into account the total running time.

  • Page 31: Malfunctions

     Reset via pin 13 on the "REMOTE" connection  Differentiated malfunction display is possible via RS-485  Contact the Pfeiffer Vacuum Service If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Ser- vice.

  • Page 32: Service

    The following steps are necessary to ensure a fast, smooth servicing process:  Download the forms "Service Request" and "Declaration on Contamination".  Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address.

  • Page 33: Spare Parts Hipace 700

    Spare parts HiPace 700 11 Spare parts HiPace 700 Item Designation Order number Notes Pieces Order qty Operating fluid reservoir PM 143 452 -T incl. Poroplast rods Electronic drive unit TC 400 according to the rating plate depends on the connection panel Mating plug "remote"...

  • Page 34: Accessories

    Accessories 12 Accessories 12.1 HiPace 700, 48 V DC Designation DN 160 ISO-K DN 160 CF-F DN 160 ISO-F Mounting kit for HiPace with DN 160 ISO-K, including coated centering ring and PM 016 375 -T bracket screws Mounting kit for HiPace with DN 160 ISO-K, including coated centering ring, pro-...

  • Page 35: Differences At Hipace 700, 24 V Dc

    PT 348 132 -T TIC 010, Adapter for two sensors PT R70 000 PT R70 000 PT R70 000 12.2 Differences at HiPace 700, 24 V DC Designation DN 160 ISO-K DN 160 CF-F DN 160 ISO-F TPS 310, mains pack for wall/standard rail fitting...

  • Page 36: Technical Data And Dimensions

    Technical data and dimensions 13 Technical data and dimensions 13.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: Maximum values refer exclusively to the input as a single load. ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"...

  • Page 37: Differences At Hipace 700, 24 V Dc

    4.2 W 4.2 W Permissible magnetic field max. 6 mT 6 mT 6 mT Interfaces RS-485, Remote RS-485, Remote RS-485, Remote 13.3 Differences at HiPace 700, 24 V DC ® ® ® Parameter HiPace HiPace HiPace Flange (in) DN 160 ISO-K...

  • Page 38: Dimensions

    13.4 Dimensions Ø8 DN 160 ISO-K DN 25 ISO-KF / G 1/4” M8 (6x) 145.5 Fig. 15: HiPace 700, DN 160 ISO-K Ø 8 DN 160 CF-F DN 25 ISO-KF / G 1/4“ M8 (6x) 145.5 Fig. 16: HiPace 700, DN 160 CF-F Ø...

  • Page 39: Declaration Of Conformity

    ● Machinery 2006/42/EC (Annex II, no. 1 A) ● Electromagnetic Compatibility 2004/108/EC The agent responsible for compiling the technical documentation is Mr. Helmut Bern- hardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. HiPace 700 Harmonised standards and national standards and specifications which have been ap-...
  • Page 40 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.

This manual is also suitable for:

Hipace 700p

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