Series 613
4.4
Connection overview
Controller IC2-H3:
System:
1087976EB
INSTALLATION
2
1
M
6
9
Edition 11.08.2022
Ground (FE)
connection
1
Valve
3
2
Process chamber
3
Gas inlet
4
4
Pressure sensor(s)
5
Sensor cable(s)
5
6
Controller and actuator
7
Cable to remote control unit
7
8
Cable to power supply
8
9
Pump
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