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VAT 616 Series Installation, Operating, & Maintenance Instructions

Butterfly control & isolation valve
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Installation, Operating &
Maintenance Instructions
Butterfly
control & isolation valve
with extended control range
with Ethernet interface
Series 616
DN 40-100 mm (I.D. 1.5" - 4")
This manual is valid for the valve ordering number(s):
616 . . - . .GZ - . . . .
616 . . - . .AZ - . . . .
616 . . - . .HZ - . . . .
616 . . - . .CZ - . . . .
SPS = Sensor Power Supply
1143687EA
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 10.08.2022
Sample Picture

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  • Page 1 Installation, Operating & Maintenance Instructions Butterfly control & isolation valve with extended control range with Ethernet interface Series 616 DN 40-100 mm (I.D. 1.5“ - 4") This manual is valid for the valve ordering number(s): 616 . . - . .GZ - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 616 .
  • Page 2 VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license.

  • Page 3: Table Of Contents

    Series 616 Contents Description of product ................ 6 Identification of product ....................6 Firmware ......................... 6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.7.1 Control and actuating unit ................. 7 1.7.2 Valve unit ......................
  • Page 4 Series 616 4.11 Valve Settings and States ....................37 4.11.1 States ......................37 4.11.2 Homing ......................37 4.11.3 Cycle Counter....................38 4.11.4 Position Restriction ..................38 4.11.5 Position Adaption .................... 39 4.12 Interface Ethernet ......................40 4.12.1 Ethernet Frame ....................40 4.12.2 Connector, LEDs .....................
  • Page 5 Series 616 7.2.1 Replacement of vulcanized plate or plate with O-ring ........115 7.2.2 Replacement of shaft feed through seals and valve cleaning ....... 119 7.2.3 Replacement of Option board ............... 125 Repairs ..................... 130 FPR Service ........................ 130 Dismounting and Storage ............... 131 Dismounting ........................

  • Page 6: Description Of Product

    Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 616 DESCRIPTION OF PRODUCT Technical data 1.7.1 Control and actuating unit See product data sheet. 1.7.2 Valve unit See product data sheet. 1143687EA Edition 10.08.2022 7/144...

  • Page 8: Safety

    SAFETY Series 616 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 9: Personnel Qualifications

    Series 616 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 1143687EA...

  • Page 10: Design And Function

    DESIGN AND FUNCTION Series 616 Design and Function Design Controller Double seal Coupling Plate Bearing Body XY: Double excentric bearing: prevents wearing of the O-ring and particle generation 10/144 Edition 10.08.2022 1143687EA...

  • Page 11: Function

    Series 616 DESIGN AND FUNCTION Function The valve plate acts as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the setpoint pressure. Actuation is handled by a stepper motor with an encoder for position monitoring. This principle ensures fast and accurate process pressure control even in demanding contaminating processes.

  • Page 12: Principle Of A Pressure Control System

    DESIGN AND FUNCTION Series 616 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 13: Installation

    Series 616 INSTALLATION Installation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Initial procedure 1143687EA Edition 10.08.2022 13/144...

  • Page 14: Unpacking

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 15: Installation Into The System

    Series 616 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 16: Installation Hints

    INSTALLATION Series 616 4.3.1 Installation Hints Install valve into the vacuum system. Valve seat side shall face process chamber. • Do not tighten the flange screws stronger than indicated under chapter «Tightening torque». • Do not admit higher forces to the valve than indicated under chapter «Admissible forces».

  • Page 17: Admissible Forces

    Series 616 INSTALLATION 4.3.3 Admissible forces NOTICE Force at valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. Do not higher force the valve body as specified. The following forces are admissible.

  • Page 18: Admissible Forces At Controller

    INSTALLATION Series 616 4.3.4 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview...

  • Page 19: Tightening Torque Dns 40 - 50Mm

    Series 616 INSTALLATION 4.3.5 Tightening torque DNs 40 – 50mm Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow recommendations of seal manufacturer. 4.3.5.1 ISO-KF Clamping connections Clamping chain (example) ISO-KF ISO-KF recommended recommended Valve size tightening torque...

  • Page 20: Tightening Torque Dns 63 - 100Mm

    INSTALLATION Series 616 4.3.6 Tightening torque DNs 63 – 100mm Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve.

  • Page 21: Connection Overview

    Series 616 INSTALLATION Connection overview Controller IC2-H3: Ground (FE) connection System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit Cable to power supply Pump 1143687EA Edition 10.08.2022 21/144...

  • Page 22: Power-, Ground- And Sensor Connection

    4.5.1 Connection cable recommendations For Power Supply connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG18 (shielded) 0.823 mm For Sensor & Signal connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG22 (shielded) 20 m 0.326 mm 22/144 Edition 10.08.2022...

  • Page 23: Ground Connection

    Series 616 INSTALLATION 4.5.2 Ground connection Recommendation for ground connection between controller and system chassis with cable or with ground strap. Recommended torque: 1,3…1,7Nm Chassis (FE) (Functional Earth) Controller bottom side, (sample picture) • Recommendation for ground connection cable: AWG 12 (4 mm •...

  • Page 24: Power And Sensor Supply Concepts

    INSTALLATION Series 616 4.5.3 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. Concepts: 24 VDC sensors: • External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector. Refer to chapter «Power and sensor connection (+24 VDC sensors) ».
  • Page 25 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 26 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 27 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 28: Drive Power Enabled Switch, Safety Mode

    INSTALLATION Series 616 4.5.4 Drive Power Enabled Switch, Safety Mode • By means of an external switch the motor power supply can be interrupted. • In this case the valve enters the ‘safety mode’. • This motor interlock prevents the valve from moving (e.g. maintenance work). •...

  • Page 29: Power Up

    Series 616 INSTALLATION Power Up After power up or possibly after a reset of the valve homing is necessary to determine the plate position. Refer to chapter Homing «4.11.2 » Power Down, Power Failure Option 4.7.1 Power down behavior in case of power failure Valve position before power failure: Reaction of valve: Closed (isolated)

  • Page 30: Service Port, Cpa Software

    INSTALLATION Series 616 Service Port, CPA software The ‘Service port is designed for ‘Local operation’ with the software CPA - Control Performance Analyzer. Note: Detailed help on the CPA is available in the help of the CPA itself. 4.8.1 How to start 1.

  • Page 31: Update

    This may result in an immediate movement of the valve depending on remote control. 4.8.2 Update It is easy to update to the latest version of the CPA which can be found on the VAT homepage: https://www.vatvalve.com/downloads/software 1143687EA Edition 10.08.2022...

  • Page 32: Display Information

    INSTALLATION Series 616 Display Information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 4.9.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 33: Operation

    Series 616 INSTALLATION 4.9.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 INIT (start up) INIT (start up, leak tight) CLOSE OPEN C, 0…100 PRESSURE control valve position = closed, leak tight POSITION control = minimal conductance = maximum opened INTERLOCK Valve closed or open by digital input...

  • Page 34: System Settings And States

    4.10.1.2 Configuration Location: CPA/Parameters: System.Identifiaction.Configuration Parameter Description Valve Series 3-digit value representing the VAT valve series Valve Variant For some vale there exists different variants Nominal Diameter DN in mm. E.g DN250 Drive Parameter ID ID of the last drive file loaded on the valve.

  • Page 35: Statistics

    Series 616 INSTALLATION 4.10.1.4 Hardware Location: CPA/Parameters: System.Identification.Hardware Parameter Description Controller Type Identification of the use controller IC2H1, IC2H2, IC2H3 … Interface Type RS232/RS485 EtherCAT DeviceNet Logic Profibus CCLink EtherNet Option Type none Cluster SPS & PFO SPS & Cluster PFO &...

  • Page 36: Warning/Error

    INSTALLATION Series 616 4.10.3 Warning/Error Location: CPA/Parameters: System.Warning/Error Parameter Description Warning Bitmap Description No Learn Data Isolation valve does not work No Sensor Active PFO Not Ready Cluster Slave Offline Fieldbus Data Not Valid Compressed Air Not Falling when valve close Compressed Air Too Low 1024 Compressed Air Too High...

  • Page 37: Valve Settings And States

    Series 616 INSTALLATION 4.11 Valve Settings and States 4.11.1 States Location: CPA/Navigation/Parameters: Valve Parameter Description Actual Position Show position of the valve plate Position State Intermediate Closed Open Isolation State Not Isolated Isolated 4.11.2 Homing After power up or possibly after a reset of the valve homing is necessary to determine the plate position. Location: CPA/Navigation/Parameters: Valve.Homing Parameter Description...

  • Page 38: Cycle Counter

    INSTALLATION Series 616 4.11.3 Cycle Counter 4.11.3.1 Control Cycle A control cycle is a complete movement of the valve, from closing to opening and back to closing, or in percentage of movement it is 200%. Each movement is added up until 200% of the movement is reached, and then the cycle counter is incremented by 1.

  • Page 39: Position Adaption

    Series 616 INSTALLATION 4.11.5 Position Adaption 4.11.5.1 Usage Chamber Matching Adjustment of the conductance curve of different valves to obtain the same position at the same process points in different systems. Cluster Balance Adjusting the Position of individual valves in a valve cluster can be used to compensate certain Side- effects, e.g.

  • Page 40: Interface Ethernet

    INSTALLATION Series 616 4.12 Interface Ethernet Ethernet is a network technology that transmits data between different devices in a closed network via cable. Ethernet is often equated with LAN (Local Area Network). This interface enables remote operation using a command set based on RS232 commands tunneling through Ethernet.

  • Page 41: Tcp/Ip Settings

    Series 616 INSTALLATION 4.12.3 TCP/IP settings Location: CPA/Parameters.Interface Ethernet.Settings Parameter Default Value Description IP Address 192.168.9.208 Defines the address of the valve in the network Used if DHCP is off. Subnet Mask 255.255.255.0 In IPv4 networks, it specifies how many bits make up the network prefix for an IP address.

  • Page 42: Command Set

    INSTALLATION Series 616 4.12.5 Command Set 4.12.5.1 General Commands and values are case sensitive. Acknowledgement within 10ms after reception of command. Wait for acknowledgement before sending a new command. Default command termination is CR and LF. This is adjustable. CR = Carriage Return (0D hexadecimal), LF = Linefeed (0A hexadecimal) Same Syntax for Commands over Service (CPA) as over RS232 interface.
  • Page 43 Series 616 INSTALLATION 4.12.5.3 Services Code Description SET a parameter to a value GET a value of a parameter 4.12.5.4 Parameter ID Each parameter is identified by an 8-digit hexadecimal value. Parameter ID via CPA: Left click on the displayed ID at the bottom of the parameter window: Export a parameter list to Excel: 1143687EA Edition 10.08.2022...
  • Page 44 INSTALLATION Series 616 4.12.5.5 Error Codes Code Error text Description no error no error wrong command length wrong command length value too low value out of range: lower then min limit value too high value out of range: higher then max limit resulting zero adjust offset value out of resulting zero adjust offset value out of range range...
  • Page 45 Series 616 INSTALLATION 4.12.5.6 Samples: command response Open: Control Mode to 4 p:010F0200000004 p:00010F0200000004 error 00 (successfully) service 01 (set) service 01 (set) parameter 0F020000 parameter 0F020000 Index Index value value p:010F0200000002 p:00010F0200000002 Position Control: Control Mode to 2 error 00 (successfully) service 01 (set)

  • Page 46: Position And Pressure Units

    INSTALLATION Series 616 4.12.6 Position and Pressure Units 4.12.6.1 Position Defined range is used in all commands with position values. Location: CPA/Navigation/Parameters: Interface.Scaling.Position Parameter Description Position Unit 1,10,90, 100,1000,10000, user specific Value Closest Position Range if the setting of Position Unit is user specific Value Open Position 4.12.6.2 Pressure...

  • Page 47: Compound Commands

    Series 616 INSTALLATION 4.12.7 Compound Commands This function allows to SET and/or GET several values with one command. Compound is a table parameter that can hold up to 20 parameters. With the compound services 28, 29, 30 it is possible to set and/or get all the parameters contained in the compound parameter.
  • Page 48 INSTALLATION Series 616 Index Parameter ID [hex] Set compound members Get compound members Access Mode 0F0B0000 p:01A10A0200000F0B0000 p:0BA10A020000 Control Mode 0F020000 p:01A10A0200010F020000 p:0BA10A020001 Actual Position 10010000 p:01A10A02000210010000 p:0BA10A020002 Position State 00100000 p:01A10A02000310100000 p:0BA10A020003 Actual Pressure 07010000 p:01A10A02000407010000 p:0BA10A020004 Target Pressure Used 07030000 p:01A10A02000507030000 p:0BA10A020005...
  • Page 49 Series 616 INSTALLATION 4.12.7.4 SET and GET Compound Build Compound 3 A10A0300 (with set and get values) Index Parameter ID [hex] Set compound members Control Mode 0F020000 p:01A10A0300000F020000 p:0BA10A030000 Target Position 11020000 p:01A10A03000111020000 p:0BA10A030001 Target Pressure 07020000 p:01A10A03000207020000 p:0BA10A030002 Separation p:01A10A0300030 p:0BA10A030003 Access Mode...

  • Page 50: Compatible Command Sets

    Command Set Location: CPA\Parameters: Interface RS232/RS485.Command Set Parameter Description Command Set First VAT integrated controller with RS232 Service Port VAT PM controller PM V2 VAT PM controller with sensor crossover Tylan These instruction sets are often used in controllers from...
  • Page 51 Series 616 INSTALLATION System Data Description Resp Resp Set, Get Resp i:76 i:76 aaaaaa Compound bbbbbbbbcde a Pressure b Position c Access Mode: 0=Local, 1=Remote, 2=Locked d Control Mode: 0=Init,1=Homing,2=Position,3=Close,4=Open,5=Pressure Control,6=Hold,7=Learn,8=Interlock Open,9=Interlock Close,12=Power Failure,13=Safety,14=Error e Warning Present: (in i:51 or i:52) 0=no, 1=yes s:04 s:04 i:04...
  • Page 52 INSTALLATION Series 616 Positon Data Set, Get Description Resp Resp Resp aaaaaa Actual Position Close Open i:38 i:38 aaaaaaaa Position Control, a Target Position Hold Position Mode (Release Hold) i:68 i:68 aaaaaa Speed: 0 - 1000 Pressure Reading Data Description Resp Resp Set, Get Resp...
  • Page 53 Series 616 INSTALLATION Pressure Control Data Description Resp Resp Set, Get Resp i:38 i:38 aaaaaaaa Pressure Control, a Target Pressure Hold Pressure Control Mode (Release Hold) s:02 s:02 i:02 i:02 abcdeeff Pressure Control Setup s:02a i:02a a Controller: 0=Adaptive,1=PI Downstream,2=PI Upstream,3=Softpump b Gain Factor (Adaptive) 0=0.1,1=0.13,2=0.18,3=0.23,4=0.32,5=0.42,6=0.56,7=0.75,8=1.0,9=1.33,A=1.78,B=2.37, C=3.16,D=4.22,E=5.62,F=7.5,G=0.0001,H=0.0003,I=0.001,J=0.003,K=0.01,L=0.02,M=0.05...
  • Page 54 INSTALLATION Series 616 Interface Data Description Resp Resp Set, Get Resp s:20 s:20 i:20 i:20 abcdefgh Setup1 a Baud Rate: 0=600,1=1200,2=2400,3=4800,4=9600,5=19200,6=38400,7=57600,8=115200,9=230400 b Parity Bit: 0=Even, 1=Odd, 2=Mark, 3=Space c Data Length: 0=7bit, 1=8bit d Stop Bit: 0=1bit, 1=2bit e Command Set: 0=IC, 1=PM f Digital Input 1: 0=Interlock Open, 1=Interlock Open Inverted, 2=Disabled...
  • Page 55 Series 616 INSTALLATION Errors Description Error message Protocol Parity error E:000001 Input buffer overflow (to many characters) E:000002 Framing error (data length, number of stop bits) E:000003 Overrun (Service interface: Input buffer register overflow) E:000004 Commands CR or LF missing E:000010 : missing E:000011...
  • Page 56 INSTALLATION Series 616 4.12.8.2 Command Set PM Note: All position and pressure values are integer values. Default Range pressure 0 … 1000, position 0 … 1000 (see Position and Pressure Units) Command Specific Settings Location: CPA\Parameters: Interface RS232/RS485.Settings Parameter Description R S Answer Specifies response to R (set position) and S (set pressure) commands Standard...
  • Page 57 Series 616 INSTALLATION Position Control Data Description Resp Resp Set, Get Resp aaaaaa Actual Position Close Open aaaaaa Position Control, a Target Position Hold Position Mode (Release Hold) aaaaaa Speed: 0 - 1000 String Position Status: ____OK, POS-ER, AIR-ER i:04 i:04 V1:aV2:b Valve Status:...
  • Page 58 INSTALLATION Series 616 Setup Data Description Resp Resp Set, Get Resp i:02 i:02 abcdef Setup Sensor 1 and Sensor 2 i:03 i:03 a Voltage Range not used b Display Range not used c Display Unit not used d Gain Factor 0=0.1,1=0.13,2=0.18,3=0.23,4=0.32,5=0.42,6=0.56,7=0.75,8=1.0,9=1.33,A=1.78, B=2.37,C=3.16,D=4.22,E=5.62,F=7.5,G=0.0001,H=0.0003,I=0.001,J=0.003,K=0.01, L=0.02,M=0.05...
  • Page 59 Series 616 INSTALLATION Errors Description Error message Parity error E:000001 CR or LF missing E:000002 : missing E:000003 Wrong Letter Code E:000004 Numeric value not given in 6 digits E:000005 Numeric value out of range E:000006 Pressure Mode, Zero or Learn have been selected with no sensor connected E:000007 Instruction given in Access Mode Local E:000008...
  • Page 60 INSTALLATION Series 616 4.12.8.3 Command Set PM V2 Note: This command set is quite the same as Command Set PM. Differences: Same commands as Command Set PM except Setup (s: instead of s:1 and s:2) Communication range for Pressure is settable (see s: command below) Additional commands: U:18, U:19;...
  • Page 61 Series 616 INSTALLATION 4.12.8.4 Command Set Tylan Command Specific Settings Location: CPA\Parameters: Interface RS232/RS485.Settings Parameter Description Tylan M1 Use of M command (Control Gain) None Gain Factor/P-Gain Tylan X1 Use of X command (Control Lead) None Ramp Time/I-Gain Tylan J1 Use of J command (Valve Type) None Restart...
  • Page 62 INSTALLATION Series 616 Response Description Config Low Threshold process limit #2 High Threshold process limit #2 Soft start Rate Setpoint n Setpoint Nr 1..5 m Request Nr 15 .. 19 Soft start Rate Setpoint Analog Soft start Rate Open Soft start Rate Close Position Indicator Range Output Direct Reverse Control Sensor Range...
  • Page 63 Series 616 INSTALLATION 4.12.8.5 Command Set Tylan Type 2 This command set is the same as Tylan, except for the following settings and commands. Command Specific Settings Location: CPA\Parameters: Interface RS232/RS485.Settings Parameter Description Tylan V Use of V command (Controller Selector) None Pressure Control Selector Commands...
  • Page 64 INSTALLATION Series 616 4.12.8.6 Command Set Tylan Type 1 Command Specific Settings Location: CPA\Parameters: Interface RS232/RS485.Settings Parameter Description Tylan V Use of V command (Controller Selector) None Pressure Control Selector Commands Note: Set commands have no response Response Description No Effect Open Close Hold...

  • Page 65: Pressure Sensor

    Series 616 INSTALLATION 4.13 Pressure Sensor 4.13.1 Mechanical connection requirements Fast and accurate pressure control requires a fast sensor response. Sensor response time: < 50ms. The sensor is usually connected to the chamber by a pipe. The line must be short enough and the conductance must not be reduced by a too small line diameter or a low conductance shut-off valve, To maintain that the response time is not degraded by this connection it needs to meet the following requirements:...

  • Page 66: Configuration

    INSTALLATION Series 616 4.13.2 Configuration The CPA window shows a good overview of the sensor settings: The valve supports 2 sensors. Zero Adjust is for offset compensation of linear sensors Crossover is automatic switch over between 2 linear sensors 66/144 Edition 10.08.2022 1143687EA...
  • Page 67 Series 616 INSTALLATION Location: CPA/Navigation/Parameters: Pressure Sensor.Sensor 1, Pressure Sensor.Sensor 2 Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’ if the sensor signal is used for pressure control Input Source ‘Analog’ Sensor has an analog voltage interface and is direct connected to the valve.

  • Page 68: Crossover (2 Sensor Operation Mode)

    INSTALLATION Series 616 4.13.3 Crossover (2 sensor operation mode) If two sensors are connected to the controller uses both for pressure control and pressure feedback. The controller selects each sensor or blends both sensor signals to the “Actual Pressure” used for control and feedback.

  • Page 69: Zero Adjust

    Series 616 INSTALLATION 4.13.4 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. Note: A maximum offset voltage of +/- 1.4 V can be compensated. Location: CPA/Navigation/Parameters: Pressure Sensor.Zero Adjust Parameter Description Zero Adjust.Sensor Selection Select the sensor for the zero adjust: •...

  • Page 70: Logarithmic Pressure

    INSTALLATION Series 616 4.13.5 Logarithmic Pressure To control wide pressure ranges, it is advantageous to control with a logarithmic signal. Note: Only the PI and the Softpump controller can control with a logarithmic signal. Adaptive controller needs a linear signal. Location: CPA/Parameters: Pressure Sensor.General Settings.Logarithmic Pressure Parameter Description...

  • Page 71: Power Connector Digital Io

    Series 616 INSTALLATION 4.14 Power Connector Digital IO Do not connect other pins than indicated in the schematics! Use only screws with 4-40UNC thread for fastening the DA-15 connector! 4.14.1 Digital Input 4.14.1.1 Connection Default Function Interlock Open INPUT 1 INPUT 2 Interlock Close COMMON...

  • Page 72: Digital Output

    INSTALLATION Series 616 4.14.2 Digital Output 4.14.2.1 Connection Default Function Open OUTPUT 1 OUTPUT 2 Closed COMMON 4.14.2.2 Parameter, Configuration Location: CPA/Navigation/Parameters: Power Connector IO.Digital Output Parameter Description Enable 1 enables the output State 0 Not active 1 Active Functionality 0 OPEN valve is fully open 1 CLOSE...

  • Page 73: Operation

    Series 616 OPERATION Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 74: Access Mode

    OPERATION Series 616 Access Mode 5.1.1 Overview Defines whether the interface or the CPA via the service port has the rights to control the valve Location: CPA/Parameters System Access Mode Control Permission Comment Local Remote INTERFACE Master CPA can switch to Local Locked INTERFACE Master CPA can’t switch to Local...

  • Page 75: Control Mode

    Series 616 OPERATION Control Mode The Control Mode represents the state machine of the valve. Writing to Control Mode requests a change in the state while reading Control Mode returns the actual state of the state machine. Init State after power up. Remains if Homing is not started or no Exception occurs Homing The valve performs the homing procedure to initialize the position.

  • Page 76: View

    OPERATION Series 616 CPA/Parameter: System.Control Mode Location: 5.2.1 View First digit on display Init Homing Close Open Pressure Control Position Interlock Open or Close Hold Learn Safety Mode Power Failure Error 76/144 Edition 10.08.2022 1143687EA...

  • Page 77: Pressure Control

    Series 616 OPERATION Pressure Control 5.3.1 Controller units The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Controller Selector Controller 1 Controller 2 Controller 3 Controller 4 Most applications do not need more than one controller unit. But if the result of the pressure control does not meet the expectations, different controller units can be an option for optimization: With the four controller units it is possible to use a certain controller unit for a specific pressure set point.

  • Page 78: Control Algorithm

    OPERATION Series 616 5.3.2 Control algorithm 5.3.2.1 Overview Adaptive This is the most dynamic control algorithm. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). The valve will observe the behavior of the vacuum system by moving the valve to different positions. During the learn procedure the valve performs an internal parameter estimation correspondent to the vacuum system.
  • Page 79 Series 616 OPERATION 5.3.2.2 Choose correct control algorithm Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process chamber Adaptive Control valve Pump Upstream Control valve Process chamber Pump Soft Pump Soft Pump * Use the formula below to define the applicable pressure control algorithm.

  • Page 80: Adaptive Algorithm

    OPERATION Series 616 5.3.3 Adaptive algorithm This control algorithm may be used for downstream pressure control. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). 5.3.3.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Control Settings Parameter Description Gain Factor...
  • Page 81 Series 616 OPERATION 5.3.3.2 Learn LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
  • Page 82 OPERATION Series 616 Parameters Executing Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn Parameter Description Start Learn Starts the learn Type Standard A positioning sequence is executed and various measured values are recorded in the process. Short Opens the valve and measures the pumping speed. Information about flow and volume is required.
  • Page 83 Series 616 OPERATION Parameters Learn Bank Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn.Learn Bank x Parameter Description Status Not Used Empty learn bank Available Data available. Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Data Available with The data may still be suitable for pressure control. warnings Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Datas...
  • Page 84 OPERATION Series 616 Execute a learn procedure Set specific gas flow according to calculation below or the calculation in the CPA  ‘Adaptive Learn’ window: Learn does not need to be performed with the process gas. Instead N or Ar may be used. Set parameter Bank Selection, if only one learn is used take Bank 1.
  • Page 85 Series 616 OPERATION Gasflow calculation for Learn Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application.
  • Page 86 OPERATION Series 616 Evaluation and exchange of learn data Location: CPA/Navigation/Adaptive Learn Data The window shows the pressure position curve of the stored data in the learning banks With the menu buttons it is possible to exchange data between learn banks and between valves. 86/144 Edition 10.08.2022 1143687EA...
  • Page 87 Series 616 OPERATION 5.3.3.3 Tuning Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. 1143687EA Edition 10.08.2022 87/144...
  • Page 88 OPERATION Series 616 Gain Factor adjustment The Gain Factor effects: Stability, Response time Adjustment range is from 0.0001 to 100.0 - Higher gain results in: faster response, higher over- undershoot of pressure - Lower gain results in: slower response, lower over- undershoot of pressure Adjustment procedure: 1.
  • Page 89 Series 616 OPERATION Setpoint Ramp adjustment Setpoint Ramp effects: Undershoot of pressure, Response time Note: The ramp is described in detail in capital Pressure Ramp. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 90 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 90/144 Edition 10.08.2022 1143687EA...

  • Page 91: Pi Algorithm

    Series 616 OPERATION 5.3.4 PI algorithm This control algorithm may be used for downstream or upstream pressure control depending on configuration. 5.3.4.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x,Control Settings Parameter Description P-Gain The P-Gain is the proportional factor of the fixed control algorithm. A higher P-Gain results in faster response, higher over- / undershoot of pressure.
  • Page 92 OPERATION Series 616 5.3.4.2 Tuning The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save. Based on the PI controller configuration, the valve is able to run fast and accurate pressure control cycles. The PI parameters can be evaluated using below instruction.
  • Page 93 Series 616 OPERATION Optimizing P-Gain While optimizing P-Gain, the gas flow determined above has to be constant all the time. Start optimization with P-Gain set to 1.0 and I-Gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P- Gain is too high.
  • Page 94 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 94/144 Edition 10.08.2022 1143687EA...
  • Page 95 Series 616 OPERATION 5.3.4.3 Soft Pump/Vent algorithm This control algorithm may be used to control pressure ramps during pump down or venting the chamber. This is a modified PI controller that has been optimized to start up very gently when the valve is opened.
  • Page 96 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 96/144 Edition 10.08.2022 1143687EA...

  • Page 97: Pressure Ramp

    Series 616 OPERATION 5.3.5 Pressure Ramp Basically, the pressure ramp is used to limit the rate of pressure change. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Pressure Used Ramp 5.3.5.1 Configuration Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Ramp Parameter Description Enable Activate / Deactivate pressure target ramp Mode...
  • Page 98 OPERATION Series 616 5.3.5.2 Mode Time Slope Unit: seconds Unit: Pressure / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10mTorr/second 5.3.5.3 Type Linear Logarithmic Exponential 98/144 Edition 10.08.2022 1143687EA...
  • Page 99 Series 616 OPERATION 5.3.5.4 Applications Examples Soft pump Ramp Mode = Time Ramp Time = 100 sec Ramp Type = Linear Target Pressure = 0 Minimize pressure over- or undershoots New Target Pressure without pressure ramp New Target Pressure with pressure ramp Smoothing a staircase Pressure ramp with new target pressure to the valve every second is smoothed by a 1 sec internal ramp Ramp Time = 1sec...

  • Page 100: Profile Ramp

    OPERATION Series 616 5.3.6 Profile Ramp Profile Ramp is a Target Pressure ramp that depends on pressure ranges (segments). It is mainly used to create soft pumping or soft venting profiles. To design a profile, the segments (pressure ranges) must be defined. A segment is defined by the pressure Threshold and the Slope.
  • Page 101 Series 616 OPERATION Parameters: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Profile Ramp Parameter Description Enable Switches on/off the function Threshold Mode Defines which pressure the threshold refers to Actual Pressure Change happens if Actual Pressure reaches the Threshold Target Pressure Used Change happens if Target Pressure Used reaches the Threshold Ramp Type Defines the shape of the ramp Linear...
  • Page 102 OPERATION Series 616 Segment x This is the upper limit of the segment. The lower limit is defined by the next lower Threshold, or Threshold the lower limit is 0 if there is no lower Threshold. If the value exceeds the top threshold, the slope value of the top segment is used (Segment 1 in below example) Segment x Slope Defines the slope (mBar*/sec) in the segment...

  • Page 103: Automated Controller Selector

    Series 616 OPERATION 5.3.7 Automated Controller Selector With the 4 Controllers it is possible to define different pressure control settings. The Automated Controller Selector can select one of the 4 Controllers depending on Target Pressure (Mode: Threshold) or Up-Down Control (Mode: Pressure Direction) Mode:...

  • Page 104: Control Position Restriction

    OPERATION Series 616 Parameter: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Automated Controller Selector Parameter Description Enable Switches on/off the function Mode Threshold Pressure Direction Controller Selector Bitmap Used if Mode = Threshold Defines which controllers are automatically selected Threshold Condition Used if Mode = Threshold Lower or Equal Equal...

  • Page 105: Position Control

    Series 616 OPERATION Position Control 5.4.1 Parameter Location: CPA/Navigation/Parameters: Position Control Parameter Description Actual Position Position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Target Position Desired position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Position Control Speed Speed of the valve in Control Mode Position 0.001 ..

  • Page 106: Operation Under Increased Temperature

    OPERATION Series 616 5.4.2.2 Mode Time Slope Unit: seconds Unit: %* / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10% / sec Target Position Target Position Valve Position Valve Position * Unit adjustable 5.4.2.3 Type Linear...

  • Page 107: Trouble Shooting

    Series 616 TROUBLE SHOOTING Trouble shooting Warnings A warning does not lead to an interruption of valve operation. Location: CPA/Parameters: System.Services Parameter Description Warning Bitmap Description No learn data available for adaptive control Position indicator signal of the external isolation valve incorrect. No Sensor Active PFO Not Ready Cluster Slave Offline...
  • Page 108 TROUBLE SHOOTING Series 616 Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation active...

  • Page 109: Errors

    Emulates a power cycle of the valve Error Recovery Attempts to reset the Control Mode Error without restarting the valves Create a diagnostic file before recovery or restart if the error is to be analyzed by VAT 6.2.2 Error Bitmap...

  • Page 110: Error Number

    • Plate not mounted Motion controller: Internal voltage error Check power supply Motion controller: Internal error temperature Check for a heat accumulation Contact vat support • Axis inverted Motion controller: Unexpected behavior • Encoder not connected • Break not released •...
  • Page 111 Series 616 TROUBLE SHOOTING Code Description Solution SFV: Motion controller failure in master-slave Contact vat support communication Compressed air error Check compressed air Check if power supply is ok and is able to deliver needed Power supply, low voltage detected power •...

  • Page 112: Troubleshooting List

    TROUBLE SHOOTING Series 616 Troubleshooting List Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation...

  • Page 113: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 114: Maintenance Procedures

    Replacement of Option board. Refer to chapter: «Replacement of Option board» Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >...

  • Page 115: Replacement Of Vulcanized Plate Or Plate With O-Ring

    Series 616 MAINTENANCE 7.2.1 Replacement of vulcanized plate or plate with O-ring Required tools • • Allen wrench 3mm for DN 40-63mm Vacuum grease (see chapter spare parts) • • Allen wrench 4mm for DN 80-100mm Cleanroom wipes • O-ring removal tool (see chapter Accessories) Description Required tool...
  • Page 116 MAINTENANCE Series 616 Description Required tool 7. For vulcanized plates, please skip steps 8-12 for O-ring replacement and use a new vulcanized plate instead. Lubricate the new vulcanized plate with 0.025g / 0.0125 ml vacuum Vacuum grease grease. Pay attention that grease is distributed constantly over the whole seal circumference 8.
  • Page 117 Series 616 MAINTENANCE Description Required tool 12. Push in the O-ring equally around the plate into O-ring groove. Ensure it is fully and symmetrically inserted. 13. Place the plate on the shaft in the valve body 14. Tighten plate screws to block. •...
  • Page 118 MAINTENANCE Series 616 Description Required tool 19. Reinstall valve into vacuum system according to chapter «Installation» of valve manual 118/144 Edition 10.08.2022 1143687EA...

  • Page 119: Replacement Of Shaft Feed Through Seals And Valve Cleaning

    Series 616 MAINTENANCE 7.2.2 Replacement of shaft feed through seals and valve cleaning Required tools • • Allen wrench 2mm / 2.5mm Isopropyl alcohol • • Allen wrench 3mm Cleanroom wipes • • Vacuum grease (see chapter spare parts) O-ring removal tool (see chapter Accessories) Description Required tool...
  • Page 120 MAINTENANCE Series 616 Description Required tool 7. For removing the plate and exchanging the plate or O-ring we refer to Steps 4-7 or 4-12 12 of the previous chapter 7.2.1 Replacement of vulcanized plate or plate with O-ring 8. Unfasten the two (DN40-63) or three (DN80- 100) - screws completely •...
  • Page 121 Series 616 MAINTENANCE Description Required tool 11. Remove both O-rings Check and if required use new O- Soft tool rings. 12. Clean shaft feed through and the valve body Cleanroom wipes soaked with isopropyl alcohol 13. Lubricate seal contact surface of valve body with a slight film of 0.025g = 0.0125 ml vacuum grease Vacuum grease...
  • Page 122 MAINTENANCE Series 616 Description Required tool 16. Slide both O-rings onto shaft till the end 17. Deposit the following amount of vacuum grease between the O-rings: 0.075 g = 0.04 ml for DN 40 and DN 50 Vacuum grease 0.1 g = 0.05 ml for DN 63, 80,100 18.
  • Page 123 Series 616 MAINTENANCE Description Required tool 22. Tighten plate screws to block. 23. Loosen the plat screws a quarter turn • counter clockwise so that plate is still Allen wrench 3mm movable at shaft. for DN 40-63mm • Allen wrench 4mm for DN 80-100mm 24.
  • Page 124 MAINTENANCE Series 616 Description Required tool 27. Tighten clamp steel coupling with 1.1 Nm Allen wrench: 2.5 mm 28. Connect electrical POWER connection at Attention! valve Attention! Valve does synchronize automatically and moves the plate into sit of valve body (close position). 29.

  • Page 125: Replacement Of Option Board

    Series 616 MAINTENANCE 7.2.3 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 126 MAINTENANCE Series 616 7.2.3.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
  • Page 127 Series 616 MAINTENANCE Required tools • Allen Wrench 2 mm / 2.5mm • Allen Wrench 3 mm If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. Description Required tool 1.
  • Page 128 MAINTENANCE Series 616 Description Required tool 6. Replacement of the option board / whole controller Unfasten the two bolts from bottom side and dismount the controller from the actuator unit. The SPS/PFO option board has to be mounted/ dismounted from bottom side of the controller. The Controller and Interface board are fix connected and shall not be dismounted.
  • Page 129 Series 616 MAINTENANCE Description Required tool 9. Tighten clamp of steal coupling with 1.1 Nm Allen wrench: 2.5 mm 1143687EA Edition 10.08.2022 129/144...

  • Page 130: Repairs

    Series 616 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 131: Dismounting And Storage

    Series 616 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 132: Storage

    DISMOUNTING AND STORAGE Series 616 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 133: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 1143687EA Edition 10.08.2022...

  • Page 134: Packaging

    Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. Cover all valve openings with a protective foil. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 135: Disposal

    Series 616 DISPOSAL Disposal Observe the local regulations for disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the disposal. CAUTION Risk of damage Indicates a hazardous situation which, if not avoided, may result in minor or moderate...

  • Page 136: Spare Parts

    • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. • The following table(s) contain spare parts that may be replaced by the customer.

  • Page 137: Iso-Kf For Dns 40 - 63Mm

    Series 616 SPARE PARTS 12.1 ISO-KF for DNs 40 - 63mm 12.1.1 Drawing Plate screws Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedthrough seals Plate O-ring 1143687EA Edition 10.08.2022 137/144...

  • Page 138: Iso-Kf Valve Unit - Aluminum Hard Anodized, Without Heating

    SPARE PARTS Series 616 All “Item“ refer to chapter «Drawing» 12.1.2 ISO-KF valve unit – aluminum hard anodized, without heating Item Description DN 40 / 1½” DN 50 / 2” Valve size Product ordering number 61632 - KH . . 61634 - KH .

  • Page 139: Seals And Grease

    Series 616 SPARE PARTS 12.1.4 Seals and grease Item Description Vacuum seal kit (VITON ®) rotary feed through 237235 Vacuum grease (2ml syringe) 206792 DN 40 / 1½” DN 50 / 2” Vacuum seal kit (VITON ®) 327291 365577 for plate For versions such as: •...

  • Page 140: Iso-F For Dns 80 - 100Mm

    SPARE PARTS Series 616 12.2 ISO-F for DNs 80 - 100mm 12.2.1 Drawing Sample picture Plate screws Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedthrough seals Plate O-ring 140/144 Edition 10.08.2022 1143687EA...

  • Page 141: Iso-F Valve Unit - Aluminum Hard Anodized, Without Heating

    Series 616 SPARE PARTS All “Item“ refer to chapter «Drawing» 12.2.2 ISO-F valve unit – aluminum hard anodized, without heating Item Description Valve size DN 63 / 2½” DN 80 / 3” DN 100 / 4” Product 61636 - PH . . - ..61638 - PH .

  • Page 142: Seals And Grease

    SPARE PARTS Series 616 12.2.4 Seals and grease Item Description Valve size All sizes Rotary feed through seals 323642 (VITON ®) (2 pcs) DN 63 / 2½” DN 80 / 3” DN 100 / 4” Plate seal (VITON ®) 380402 234889 365579 Vacuum grease (4g syringe)

  • Page 143: Control Unit And Accessories

    Control unit and Accessories 12.3.1 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 858530 (±15 VDC Sensor Power Supply) Option board with PFO module (Power Failure Option) 858529...
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